We report here on the self-patterned growth of nanostructured epitaxial oxide thin films
using a bottom-up approach. Different stepped (0001) sapphire surfaces have been used as
templates to grow different nanostructured thin films of yttria-stabilized zirconia
elaborated by a chemical solution deposition technique, namely sol–gel dip-coating. For
such films, a morphological instability occurs during post-deposition thermal annealing that
forces the film to split into isolated islands. Taking advantage of this effect, three distinct
types of nanostructures have been produced depending on the step morphology of the
substrate surface, and depending on the relative magnitude of the mean island diameter
(D) and the mean
terrace length (L). Flat-top islands, dome-shaped islands, tilted flat-top islands or self-organized arrays of
nano-islands can be generated. Atomic force microscopy was used to observe
nanostructures and quantitative characterizations of crystallographic and nanostructural
aspects were carried out by high-resolution x-ray diffraction reciprocal space mapping.