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2018
DOI: 10.1103/physrevapplied.10.024047
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Anisotropic Optical Properties of Metastable (011¯2)αGa2O3

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Cited by 53 publications
(40 citation statements)
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“…81 Nonetheless, the deposition of a Nd-doped a-Ga 2 O 3 layer as thick as 100 nm has also been reported, 83 suggesting that the presence of a dopant could affect the critical thickness of the layer on this orientation. Nonetheless, the thickest a-Ga 2 O 3 films were obtained on r-plane sapphire: 82 in this case a phase change to b-Ga 2 O 3 was recorded after about 200 nm of a-Ga 2 O 3 , due to the formation of large exposed c-facets which favour subsequent monoclinic phase nucleation. Being the formation of facets also related to the chemical potential during the thin film deposition, 94 we can argue that in the case of a-Ga 2 O 3 layers on r-plane sapphire substrates the thickness limitation for the obtainment of phase-pure layers could be overcome by properly tuning the Ga-to-O flux ratio.…”
Section: Substrate and Lattice Matchmentioning
confidence: 93%
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“…81 Nonetheless, the deposition of a Nd-doped a-Ga 2 O 3 layer as thick as 100 nm has also been reported, 83 suggesting that the presence of a dopant could affect the critical thickness of the layer on this orientation. Nonetheless, the thickest a-Ga 2 O 3 films were obtained on r-plane sapphire: 82 in this case a phase change to b-Ga 2 O 3 was recorded after about 200 nm of a-Ga 2 O 3 , due to the formation of large exposed c-facets which favour subsequent monoclinic phase nucleation. Being the formation of facets also related to the chemical potential during the thin film deposition, 94 we can argue that in the case of a-Ga 2 O 3 layers on r-plane sapphire substrates the thickness limitation for the obtainment of phase-pure layers could be overcome by properly tuning the Ga-to-O flux ratio.…”
Section: Substrate and Lattice Matchmentioning
confidence: 93%
“…In the case of a-Ga 2 O 3 the deposition temperature with MBE (no catalyst employed) has been so far limited to 500 1C r T g r 640 1C. [81][82][83] 2.3. Growth rate HVPE, MOVPE and mist-CVD all allow for comparable Ga 2 O 3 growth rates of about 500-1000 nm h À1 .…”
Section: Temperaturementioning
confidence: 99%
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“…It should be noted that α ‐Ga 2 O 3 might also be observed at the interface with sapphire . Phase stabilization of α ‐Ga 2 O 3 was observed on r ‐plane α ‐Al 2 O 3 in plasma‐assisted MBE up to a film thickness of around 200 nm . Thus, initially the resulting strain energy due to lattice mismatch shifts the thermodynamic equilibrium from the stable β ‐Ga 2 O 3 toward the metastable α‐modification .…”
Section: Resultsmentioning
confidence: 98%