Angular distribution of sputtered alloy. Experimental and simulated study

Fqih, M. Ait El

doi:10.1140/epjd/e2009-00272-8

Cited by 10 publications

(6 citation statements)

References 20 publications

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“…The first one should mimic experimentally observed and theoretically established angular-dependent (total) sputtering yields. These generally increase monotonically with the local incidence angle θ in up to a maximum at around 50 • -70 • and then fall straight to zero for θ in approaching 90 • [23]- [27]. Using the function derived from the respective analytic formula in [24] with peak c max = 1 at local incidence angle θ max = 65 • , we can model this behavior by setting…”

Section: Modelmentioning

confidence: 99%

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Linz¹

2010

J. Stat. Mech.

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A conceptually simple mesoscopic solid-on-solid type block model for the potential redeposition effect during spatio-temporal evolution of surfaces under normal ion-beam erosion is developed and investigated in considerable detail. This model focuses on redeposition only while neglecting other surface effects and is kept one-dimensional to allow for an analysis of large systems on long timescales. After introducing the model we discuss the evolution of the mean height and the root mean square roughness for different initial surface profiles and process parameters. The results are then compared to experiments and the recently proposed non-locally stabilized Kuramoto-Sivashinsky equation in order to discuss whether particle redeposition might be the potential origin of the non-local damping term in that equation.

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Section: Modelmentioning

confidence: 99%

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Linz¹

2010

J. Stat. Mech.

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“…To obtain the angular distribution of sputtered atoms, we used the collector technique that is widely applied in the literature and considered the most reliable (e.g., other studies 13–18 ). Sputtered particles were collecting on a polymer substrate foil placed around the target.…”

Section: Methodsmentioning

confidence: 99%

“…Sputtered particles were collecting on a polymer substrate foil placed around the target. As in our previous works, 14,18 a polyethylene terephthalate (Mylar™) foil was used as a collector. It was rolled around the inner surface of cylindrical sample chamber (radius = 7.25 cm), whose axis passes through the impact spot (Figure 1).…”

Section: Methodsmentioning

confidence: 99%

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

Afkir

Fqih

Jadoual

et al. 2021

Surface & Interface Analysis

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Angular distributions of atoms sputtered from a copper target under 5‐keV Kr+ bombardment at normal incidence were simultaneously and independently studied by experiments and computer simulation. The sputtered particles are collected on a Mylar™ foil placed around the target. Deposited particles on the substrate were analyzed by optical transmission spectroscopy. The surface roughness of the irradiated target was studied by atomic force microscopy, surface profilometry, and scanning electron microscopy. The experimental results were compared with the simulated angular distributions (programs OKSANA, SDTrimSP, and SRIM) and were found to be in reasonable agreement. In all cases, the angular distribution of sputtered particles showed an over‐cosine shape, which may be associated with noncompensated scattering of ejected particles by surface atoms when exiting the target. The results obtained are compared with the data from the literature.

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“…The experimental set‐up, employed in the following work, concerning ionic bombardment of solid surfaces has been portrayed in great detail elsewhere . Briefly, Kr + ions are formed by electron impact on Kr (99.998% purity) in a plasma source.…”

Section: Methodsmentioning

confidence: 99%

Bombardment‐induced light emission of clean and oxygen‐covered Al, Cu, and Cu_x Al_1‐x targets

Fqih

Afkir

Boujlaidi

et al. 2018

Surface & Interface Analysis

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Light emission during 5 keV Kr + ion bombardment of Cu, Al, and CuAl alloys with different concentration is studied. The transient effect phenomenon has been investigated under two pressure conditions: one at base pressure (approximately 10 −7 Pa) and the other with introduction of oxygen gas (approximately 10 −4 Pa). The experimental oxygen sputtering yield was compared with simulation using the SRIM-code program. Both of them were in fairly good agreement.

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Angular distribution of sputtered alloy. Experimental and simulated study

Cited by 10 publications

References 20 publications

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

Bombardment‐induced light emission of clean and oxygen‐covered Al, Cu, and Cu_x Al_1‐x targets

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Angular distribution of sputtered alloy. Experimental and simulated study

Cited by 10 publications

References 20 publications

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Modeling particle redeposition in ion-beam erosion processes under normal incidence

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

Bombardment‐induced light emission of clean and oxygen‐covered Al, Cu, and Cux Al1‐x targets

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Product

Resources

About

Bombardment‐induced light emission of clean and oxygen‐covered Al, Cu, and Cu_x Al_1‐x targets