Light emission during 5 keV Kr + ion bombardment of Cu, Al, and CuAl alloys with different concentration is studied. The transient effect phenomenon has been investigated under two pressure conditions: one at base pressure (approximately 10 −7 Pa) and the other with introduction of oxygen gas (approximately 10 −4 Pa). The experimental oxygen sputtering yield was compared with simulation using the SRIM-code program. Both of them were in fairly good agreement.

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