Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings

Deumié, Carole; Giovannini, Hugues; Amra, Claude

doi:10.1364/ao.41.003362

Cited by 19 publications

(11 citation statements)

References 24 publications

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“…Scattering data have then been extended to angular phase measurements thanks to interferences between the two polarizations. That is the Ellipsometry of AngleResolved Scattering (EARS) [8,9]. In a recent work limited to slightly inhomogeneous samples, we demonstrated the validity of the E.A.R.S.…”

Section: Introductionmentioning

confidence: 70%

“…In the case of low angle resolved scattering, surface and bulk effects can produce the same intensity level, as illustrated in Figure 5, which is a theoretical curve [9,11]. It is then impossible to solve the inverse problem, that is to say to identify the origin of scattering to quantify the heterogeneities of the structure.…”

Section: Ellipsometry Of Light Scatteringmentioning

confidence: 99%

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Ellipsometry of speckle patterns for the analysis of optical inhomogeneities (surfaces and bulks)

et al. 2006

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Far field light scattering from rough surfaces and inhomogeneous bulks has extensively been studied these last decades, with a major application in random media characterization. Angular Resolved measurements are performed and investigated thanks to the development of electromagnetic models. The studies are extended to the case of high angular resolution, that's mean to the speckle pattern. We show that the analysis of the polarization state of the scattered field permits to complete this study and to identify signatures of the different polarization sources which are surfaces or bulks. An application will then be to annul each scattering source in order to select the characterized element.

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Section: Introductionmentioning

confidence: 70%

Section: Ellipsometry Of Light Scatteringmentioning

confidence: 99%

Ellipsometry of speckle patterns for the analysis of optical inhomogeneities (surfaces and bulks)

et al. 2006

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“…To better understand the multiple scattering interactions we use symbolic representations to write (34) (35) where On iterating (35) and inserting it in (32) we get (36) where the subscript represents the up-going part of the quantity in the parentheses. The expression for incoherent scattered intensity in the lower half-space is the same as in (33). We hence understand that the incoherent intensity is generated in the following manner.…”

Section: Transport Theoretic Approachmentioning

confidence: 97%

“…Medical imaging in another vast and important subject [32] where surface and volumetric scattering are mixed and one needs to suppress one and highlight the other. Another discipline where this kind of study is actively pursued is in defect detection in optical and solid state devices [33], [34] where one needs to identify whether the performance degradation of such devices is due to surface defects or bulk defects. For all such applications the ability to separate volume and surface effects can serve not only as a computational tool but also as a remote sensing discriminant.…”

Section: Introductionmentioning

confidence: 99%

Multiple Scattering Volume-Surface Interactions

Mudaliar

2013

IEEE Trans. Antennas Propagat.

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The combined problem of scattering from random media with rough boundaries is fairly complicated. Hence, it is important to understand the scattering processes involved so that one may develop approximate methods appropriate for the application at hand. To facilitate this we have presented three different approaches: two using statistical wave theories and the third using the transport theory. Each approach gives a different perspective of the scattering processes involved. Although the transport theory is popularly used for this problem we find that certain multiple scattering volume-surface interactions are ignored in this approach. In contrast, our 'unified approach' properly takes into account all multiple scattering processes. One reason for this is that it treats volumetric scattering and surface scattering on an equal footing. We observe that because of multiple scattering, the contributions from volumetric scattering and surface scattering get inextricably coupled, and hence cannot be treated separately as it is done in the transport theoretic approach. However, if one component is much weaker than the other the combined problem may be split into two parts: (1) volumetric scattering, and (2) surface scattering. Thus, the computation of the difficult combined problem may be reduced to the computations of two simple problems. This splitting is not the same as that obtained when employing the single scattering approximation. Our detailed analysis of the problem has enhanced our understanding of the multiple scattering processes involved.Index Terms-Rough interface, random medium, multiple scattering, volume-surface interactions.

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“…Measuring various components of polarized spectral scatter can elucidate many properties about a surface, such as thin film thickness, complex refractive index, surface roughness, surface features (blemishes, scratches), surface or subsurface defects, particulate contamination, and grain boundaries [41,44]. Methods for obtaining the various components of polarized spectral scatter and the aforementioned medium properties can include ellipsometry [45][46][47], linearly polarized angular scatter measurements [48][49][50][51][52][53][54], or bidirectional reflectance distribution function (BRDF) measurements [55][56][57][58].…”

Section: Polarized Spectral Scattermentioning

confidence: 99%

Revealing Structural Organization with Liquid Crystal-based Spectral Imaging Polarimetry

Gladish¹

2000

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Structural organization refers to the particular ordering of scatterers. Probing structural organization by imaging polarized spectral scatter provides insight into the composition of a medium, and can aid in remote sensing, the identification of tissue pathologies, and material characterization and differentiation. The vector nature of polarized light enables it to interact with optical anisotropies within a medium, while the spectral aspect of polarization is sensitive to small-scale structure. However, many polarization studies have limitations, as they provide qualitative image analysis, incomplete anisotropy information, or both. The ability to image the effects of anisotropy and small-scale structure at multiple wavelengths is key for parameterizing structural organization. The Stokes/Mueller formalism is a framework that quantifies a medium's complete spectral polarization response, and allows for the parameterization of structural organization. Additionally, advances in liquid crystal (LC) technology have resulted in new polarimetric devices. These computer-controlled devices impart spectral polarization effects on the millisecond timescale with no mechanically moving hardware, providing the ability for making rapid polarimetric measurements. This dissertation describes a methodology for revealing structural organization by exploiting the Stokes/Mueller formalism and by utilizing measurements from a spectral imaging polarimeter constructed from variable retardance LC devices, such as liquid crystal variable retarders (LCVRs) and a liquid crystal tunable filter (LCTF).The methodology includes developing the system, the Stokes/Mueller model, and all i of the procedures, calibrations, and data interpretation. Developing the system also consists of component and system calibration, a system sensitivity and performance analysis, and finally test measurements for system validation. The final validation measurement is made on a mineral sample for inferring structural organization.ii DedicationIn memory of my father, Jim Gladish.iii Acknowledgments

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Angle-resolved ellipsometry of light scattering: discrimination of surface and bulk effects in substrates and optical coatings

Cited by 19 publications

References 24 publications

Ellipsometry of speckle patterns for the analysis of optical inhomogeneities (surfaces and bulks)

Ellipsometry of speckle patterns for the analysis of optical inhomogeneities (surfaces and bulks)

Multiple Scattering Volume-Surface Interactions

Revealing Structural Organization with Liquid Crystal-based Spectral Imaging Polarimetry

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