Anemometer with hot platinum thin film

Mailly, F.; Giani, Alain; Bonnot, R.; Temple‐Boyer, Pierre; Pascal‐Delannoy, F.; Foucaran, A.; Boyer, André

doi:10.1016/s0924-4247(01)00668-9

Cited by 185 publications

(95 citation statements)

References 14 publications

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“…Platinum is corrosion resistant, operates in high temperature range, compatible with standard micromachining techniques and used in many implantable devices [20][21][22][23][24][25].…”

Section: Hot-wire and Hot-filmmentioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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“…Platinum is corrosion resistant, operates in high temperature range, compatible with standard micromachining techniques and used in many implantable devices [20][21][22][23][24][25].…”

Section: Hot-wire and Hot-filmmentioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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“…Making a CFD analysis to give a fundamental theoretical answer to what is happening in our setup when the sensor is mounted step down or step up would be rather complicated and very extensive work. It is rather complicated to simulate vortex flows, because the occurrence of vortices is dependent on the geometry, investigations into the turbulent length have to be made, and the change from laminar to turbulent flow is still part of current research and scientific papers (Cheng and Hung, 2006;Pan and Acrivos, 1967;Imberger, 1974;Shen and Floryan, 1985;Pey et al, 2014). For a flow sensor, the influence of the thermal field above the step down step up Figure 12.…”

Section: Discussionmentioning

confidence: 99%

“…Over the last decades, many different thermal flow sensors have been developed for the accurate measurement of gas flows (Van Putten and Middelhoek, 1974;Van Herwaarden and Sarro, 1986;Johnson and Higashi, 1987;Ashauer et al, 1999;Mailly et al, 2001;Ito et al, 2010;Adamec and Thiel, 2010;Ma et al, 2009). A wide range of flow sensors have been developed for different applications, such as automotive, industrial, and medical.…”

Section: Introductionmentioning

confidence: 99%

Investigations into packaging technology for membrane-based thermal flow sensors

Dumstorff

Brauns

Lang

2015

J. Sens. Sens. Syst.

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Abstract.A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown, which is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. In addition, the experimental results are discussed. If a membrane-based thermal flow sensor is not mounted flush with the surface, vortices can occur (depending on velocity and fluid properties) or the reduction in the channel cross section plus a decrease in sensitivity have to be taken into account.

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“…Thermoelectric cooling based on Peltier effect has the advantages of not using any moving mechanical parts, being environmental friendly, allowing integration with microelectronic circuits and being easy to control. The hot wire anemometer has been used for many years as a research tool in fluid mechanics (1)(2)(3)(4)(5)(6) . A hot wire anemometer usually refers to the use of a small electrically heated element placed in a fluid with the aim of measuring a property of that medium.…”

Section: Iintroductionmentioning

confidence: 99%

Anemometer Based On Peltier Effect Deposed By Flash Evaporation

Ondo-Ndong¹,

Gnanga²,

Giani³

et al. 2015

IJAREEIE

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ABSTRACT:The principal motivation of this work is the development and realization of anemometers based butterfly structureelaborated by flash evaporation technique on polyimide substrate using Bi2Te3-Sb2Te3(P) and Bi2Te3-Bi2Se3(N) materials which best values of Seebeck coefficient ( (T)) at room temperature are found to be 240 V/K and -220 V/K, respectively. These anemometers are based on both Peltier and Joule effects. We elaborate a particular geometry in order to improve the sensitivity of butterfly structuresensors. Fabrication and evaluation of performance devices are reported 2.3°C of cooling of only one Peltier module device for an optimal current of I opt = 18mA is obtained.

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Anemometer with hot platinum thin film

Cited by 185 publications

References 14 publications

Micromachined Thermal Flow Sensors—A Review

Micromachined Thermal Flow Sensors—A Review

Investigations into packaging technology for membrane-based thermal flow sensors

Anemometer Based On Peltier Effect Deposed By Flash Evaporation

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