Analysis on principle and key techniques of deterministic finishing

Abstract

Soft finishing methods are required to meet the need of modern optical surface while the deterministic finishing processing is needed to ensure the high precession surface.. The concepts and the math model of deterministic finishing are presented. The key technologies of deterministic finishing are analyzed, which include the requirement of removal rate function, the solving method of dwell time, and the finishing scan path. The deterministic finishing methods used at present are Small Tool Lapping and Polishing (STLP), Magneto-Rheological Finishing (MRF), Ion Beam Figuring (IBF), Atmospheric Pressure Plasma Chemical Finishing (APPCF) and so on. The principle, removal rate function characteristic and new development of these deterministic finishing methods are introduced.