Analysis of the different contributions to the response of SAW gas sensors

Анисимкин, В. И.; Kotelyanskiǐ, I. M.; Fedosov, V.I.; Caliendo, Cinzia; Verardi, P.; Verona, É.

doi:10.1109/ultsym.1995.495630

Cited by 16 publications

(6 citation statements)

References 5 publications

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“…When both the density and elastic modulus were changed, as described above, because the effect of the density change and that of the elastic modulus change were in opposite directions which made them to compensate each other, the output voltage change in the same direction with that when only the elastic modulus was changed, but the changed value was smaller. The result can be interpreted as in agreement with that from V. I. Anisimkin [9] . Fig.…”

Section: B Effect Analysis Of the Palladium Film Parameters On The Ssupporting

confidence: 91%

Analysis of different effect on the response of SAW hydrogen gas sensor

Zhou

Tao

Yin

2008

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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a three-dimensional finite element model of a surface acoustic wave (SAW) delay line based hydrogen gas sensor on Y-X cut LiNbO3 substrate with a palladium film was developed and simulated using ANSYS platform. The changes of the output voltage were studied due to the exposure of the palladium film to hydrogen, and the effects of the elastic modulus and density changes of the Pd film were analyzed. The effects of the palladium film density decrease and elastic modulus decrease on the SAW hydrogen gas sensor are in opposite ways. The effect resulted from the elastic modulus decrease is more obvious. The impulse response analysis of the device was performed, from which the frequency response and hence a center frequency of about 100MHz was obtained. Keywords-surface acoustic wave(SAW); piezoelectric; hydrogen gas sensor; finite element method(FEM)

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Section: B Effect Analysis Of the Palladium Film Parameters On The Ssupporting

confidence: 91%

Analysis of different effect on the response of SAW hydrogen gas sensor

Zhou

Tao

Yin

2008

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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“…This would require the sensing film volume to be increased by 10% to compensate for the expansion due to mass change. The structure density was decreased by 2% and Young's modulus of elasticity changed from 128 GPa to 110 GPa (Fabre et al, 2003;Anisimkin et al, 1995).…”

Section: Sensing Layersmentioning

confidence: 99%

A 3-D Finite Element Model of Surface Acoustic Wave Sensor Response

2006

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Surface acoustic wave (SAW) devices coated with a thin layer of chemoselective material provide highly sensitive chemical sensors for the detection and monitoring of vapors and gases. The species detection is carried out by monitoring the shifts in frequency of the surface waves generated on piezoelectric substrates. These devices are conveniently small, relatively inexpensive and quite sensitive. The design of efficient sensors necessitates the development of response models which can lead to improved understanding of the wave propagation characteristics in SAW devices. The analytical models used to simulate the mechanical and electrical behavior of piezoelectric devices generally introduce simplifying assumptions that are often invalid for actual designs. Numerical techniques such as finite element method have proven to be a viable option to model wave propagation in SAW devices operating in the MHz-GHz range.In this work, 3-D finite element models (FEM) based on a ~100 MHz YZ-LiNbO 3 piezoelectric substrate coated with a thin Pd sensing layer was simulated to gain insights into the H 2 sensor response. Literature suggests that structural and morphological changes due to gas absorption occurring at the molecular scale affect the material properties of the sensing layer which in turn affects the wave propagation at macro-scale. The changes in the material properties of the sensing layer on gas exposure were used to simulate the behavior of a SAW sensor. Frequency responses of the displacement and voltage waveforms generated at the output IDT nodes were used to quantify the effects of gas interaction. Additionally, 2-D FEM simulations of modified sensing layers involving micron-sized gratings have also been carried out and compared with results obtained using thin films. This study demonstrates the effectiveness of finite element models in understanding gas sensor response.

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“…As long as the thickness of the sensitive material is less than the wavelength of the surface wave, these can be considered Rayleigh waves. The associated mechanisms (phenomena) are mass loading effects, changes of the elastic properties and electrical conductivity [6], [7], [8].…”

Section: Introductionmentioning

confidence: 99%

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in SAW Sensing Devices

Arab¹,

Madigou²,

Chevallier³

et al. 2022

Preprint

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This study aimed to discuss the combined theoretical and experimental results of elastic properties of the tungsten trioxide films supported on Quartz (YX)/45°/10° resonator, as surface acoustic wave (SAW) device. The SAW system with different thicknesses of WO3 thin films were imaged and structurally characterized by X-Ray diffraction, atomic force and transmission electron microscopy. The deposited WO3 films (100 nm, 200 nm and 300 nm) were crystallized in a single monoclinic phase. The acoustoelectric properties of the SAW system were obtained by combining theoretical simulations with experimental measurements. The modeling of the SAW devices has been performed by the finite element and boundary element methods (FEM/BEM). The theoretical and experimental electrical admittances responses obtained at room temperature gave access to elastic constants. The gravimetric effect of the deposited layers is observed by a resonance frequencies shift to lower values with thicknesses film. Moreover, the acoustic losses are affected by the dielectric losses of the WO3 films, while the resonant frequency decreases almost linearly. SAW devices revealed strong displacement fields with low acoustic losses as a function of WO3 thicknesses. For all the deposited layers, the Young's modulus and the Poisson coefficient obtained are respectively of 8 GPa and 0.5.

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Analysis of the different contributions to the response of SAW gas sensors

Cited by 16 publications

References 5 publications

Analysis of different effect on the response of SAW hydrogen gas sensor

Analysis of different effect on the response of SAW hydrogen gas sensor

A 3-D Finite Element Model of Surface Acoustic Wave Sensor Response

Investigation of Elastic Properties of WO3 Thin Films Supported on Quartz in SAW Sensing Devices

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