Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

Elzakker, G. van; Nádaždy, Vojtěch; Tichelaar, F.D.; Metselaar, J.W.; Zeman, Miro

doi:10.1016/j.tsf.2005.12.133

Cited by 27 publications

(10 citation statements)

References 19 publications

(21 reference statements)

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“…The solar cells were characterized by IV measurements under standard AM 1.5 illumination conditions. Figure 1 shows TEM images of 1 µm thick films that have been deposited under different hydrogen dilutions on glass [24]. It clearly demonstrates that the growth of silicon films in the protocrystalline growth regime is inhomogeneous for larger dilution ratios (R > 20), for which the transition from amorphous to microcrystalline phase can be observed.…”

Section: Methodsmentioning

confidence: 97%

“…Using Raman spectroscopy we verified that the deposition conditions described in section 2 have resulted in 300 nm thick amorphous films for the full range of dilution ratios (up to R = 40). (The films shown in Figure 1 were deposited using different conditions [24], and are shown here only to illustrate the effect of R on the phase transition. )…”

Section: Methodsmentioning

confidence: 99%

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Structural properties of amorphous silicon prepared from hydrogen-diluted silane

Zeman

Elzakker

Tichelaar

et al. 2009

Philosophical Magazine

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Section: Methodsmentioning

confidence: 97%

Section: Methodsmentioning

confidence: 99%

Structural properties of amorphous silicon prepared from hydrogen-diluted silane

Zeman

Elzakker

Tichelaar

et al. 2009

Philosophical Magazine

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“…It is noted that the samples do not lie on the same point of the Paschen curve as illustrated by the obvious differences in p and r d , while this is known to be a way to distinguish different types of a-Si:H and their light soaking stability [32]. However, the particular samples discussed in this work can still be compared, since the deposition conditions with the lowest and highest R values are known from previous work to yield solar cells with a significantly different light soaking stability [29,65]. The samples with R values in between 0 and 10 have been added to display possible trends with more statistical certainty.…”

Section: A Sample Definitionsmentioning

confidence: 96%

Migration of Open Volume Deficiencies in Hydrogenated Amorphous Silicon During Annealing

Melskens

Eijt

Schouten

et al. 2017

IEEE J. Photovoltaics

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“…The hydrogen dilution ratio (R = [H 2 ]/[source gas]) was set to 10. At R = 10 the silicon films are still fully amorphous [5]. Additional deposition parameters were: rf power density of 34 mW/cm 2 , an inter-electrode distance of 14 mm, a substrate temperature of 235 °C and a deposition pressure of 80 Pa or 90 Pa with and without hydrogen dilution, respectively.…”

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confidence: 99%

Amorphous silicon‐based multilayers for photovoltaic applications

Zeman¹,

Isabella

Tichelaar

et al. 2010

Phys. Status Solidi (c)

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Cover illustration Special issue: Biotech Reviews – Biofuels, Protein engineering, Plant biotechnology. This issue provides an excellent overview of the latest developments in biotechnology with its very broad topics. You will find articles on genome engineering of mammalian cells, engineering of plant cells for glycosylation and expression of proteins in different organelles, cellular responses to ethanol stress, neuronal stem cells and more. Cover image by Elena du Guerny (8 years old).

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Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

Cited by 27 publications

References 19 publications

Structural properties of amorphous silicon prepared from hydrogen-diluted silane

Structural properties of amorphous silicon prepared from hydrogen-diluted silane

Migration of Open Volume Deficiencies in Hydrogenated Amorphous Silicon During Annealing

Amorphous silicon‐based multilayers for photovoltaic applications

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