1976
DOI: 10.1063/1.323119
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Analysis of stress and strain distribution in thin films and substrates

Abstract: Calculations are presented for the distribution of stress and strain in thin films and substrates from inhomogeneous plane stresses developed in the film during deposition. The results can be applied to the ’’bending-plate method’’ of determining the unknown stresses in a film, in which the deformation of the substrate surface is measured. Thereby the local values of the stress tensor within the film plane (averaged through the film thickness) and the center of the stress distribution normal to the film plane … Show more

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Cited by 183 publications
(43 citation statements)
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“…The process-induced internal stress in the ITOA coating, σ ir , was determined along MD (i = 1) and TD (i = 2) from radius of curvature measurements on 60 × 5.5 mm 2 rectangular samples, following the analysis of Röll [20]:…”
Section: Materials and Experimental Methodsmentioning
confidence: 99%
“…The process-induced internal stress in the ITOA coating, σ ir , was determined along MD (i = 1) and TD (i = 2) from radius of curvature measurements on 60 × 5.5 mm 2 rectangular samples, following the analysis of Röll [20]:…”
Section: Materials and Experimental Methodsmentioning
confidence: 99%
“…In-plane deposition-induced internal stresses, σ i , were calculated using the radius of curvature of the films before, R 1 , and after, R 2 , deposition [2,20]:…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Stoney's formula has been modified many times for the purpose of evaluating bilayer and multilayer structures with arbitrary layer thickness ratios. [2][3][4][5][6][7][8][9][10][11][12][13] Klein made comments on the accuracy of some modified Stoney formulas mentioned above. 14 The assumption of a uniform curvature is explicitly or implicitly used in the context of bilayer or multilayer structures modeled as either beams or plates.…”
Section: Introductionmentioning
confidence: 99%
“…14 The assumption of a uniform curvature is explicitly or implicitly used in the context of bilayer or multilayer structures modeled as either beams or plates. [2][3][4][5][6][7][8][9][10][11][12][13]15,16 Among these studies, Freund et al, in particular, presented an excellent analysis of the film/substrate bilayer and multilayer deflection due to lattice mismatch. [7][8][9] Freund et al also noted that the assumption of a uniform curvature is not valid for large nonlinear deformations.…”
Section: Introductionmentioning
confidence: 99%