Analysis of resonance characteristics of solidly mounted resonator for mass sensing applications

Xiong, Juan; Sun, Xiliang; Guo, Peng; Zheng, Dewen; Gu, Haoshuang

doi:10.1007/s00339-014-8399-y

Cited by 4 publications

(1 citation statement)

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“…These features consequently enable improvements in terms of phase noise and frequency stability of the oscillator implementation that integrates the piezoelectric-on-silicon resonator as the frequency determining element [ 25 ]. Leveraging these benefits of piezoelectric transduction, several papers in the literature have demonstrated applications to gravimetric sensing including to particulate matter detection and mass sensing in liquids [ 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 ].…”

Section: Introductionmentioning

confidence: 99%

Towards Portable MEMS Oscillators for Sensing Nanoparticles

Chellasivalingam

Zielinski

Whitney

et al. 2022

Sensors

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This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm size-selected silver nanoparticles generated in the laboratory. The same experimental setup is then assembled to sense indoor particles that are present in the laboratory environment. The challenges associated with particle deposition as a result of assembling the portable experimental setup is highlighted. Furthermore, the MEMS oscillators demonstrate that the total mass of silver nanoparticles deposited onto the MEMS resonator surface using the inertial impaction technique-based experimental setup is approximately 7.993 nanograms. The total indoor particle mass accumulated on the MEMS resonator surface is estimated to be approximately 1.732 nanograms and 26.9 picograms for two different runs. The frequency resolution of the MEMS oscillator is estimated to be approximately 32 ppb and, consequently, the minimum detectable particle mass is approximately 60 femtograms for a 9.2 s integration time.

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