Analysis of Relationship between Inorganic Gases and Fine Particles in Cleanroom Environment

Lin, I-Kai; Bai, Hsun-Ling; Wu, Bi-Jun

doi:10.4209/aaqr.2009.10.0065

Cited by 13 publications

(10 citation statements)

References 30 publications

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“…Lastly, the performance of PAA and PI for the removal of ammonia was investigated under practical conditions − using dynamic microbreakthrough measurements at 293 K. The experiments were performed under dry as well as humid (80% relative humidity (RH)) conditions to study the effect of water, which is typically detrimental to uptake capacities for materials with Lewis acidic sites. − The partial pressure of ammonia in the feed stream (2000 mg/m 3 ) was approximately 2.8 mbar. Both materials exhibit steep breakthrough curves, indicating that the uptake process is not diffusion-controlled (Figure ).…”

Section: Resultsmentioning

confidence: 99%

A Microporous Amic Acid Polymer for Enhanced Ammonia Capture

Lee

Barın

Peterson

et al. 2017

ACS Appl. Mater. Interfaces

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Amic acids, consisting of carboxylic acids and amides, are often utilized as intermediates that can further undergo a dehydration-cyclization step to yield polymeric cyclic imides. Compared with imide-based materials, the presence of Brønsted acidic groups and multiple hydrogen-bond donors and acceptors in materials incorporating amic acids opens up the possibility for a variety of host-guest interactions. Here we report a facile and catalyst-free synthesis of a Brønsted acidic porous poly(amic acid) (PAA) and present its NH uptake properties using gas adsorption and breakthrough measurements. Simple addition of water as a cosolvent to a mixture of tetrakis(4-aminophenyl)methane and pyromellitic anhydride resulted in the formation of PAA in almost quantitative yield. Further mechanistic studies with model compounds revealed the importance of additive water to generate amic acid species selectively without forming cyclic imides at high temperatures. Gas adsorption isotherms and breakthrough curves obtained under dry and humid conditions demonstrate the enhanced NH uptake in the case of PAA compared with the related polycyclic imide at both low and high pressures. Furthermore, the results of adsorption/desorption cycling experiments provide insights into the strength of the interaction between ammonia and the polymers.

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Section: Resultsmentioning

confidence: 99%

A Microporous Amic Acid Polymer for Enhanced Ammonia Capture

Lee

Barın

Peterson

et al. 2017

ACS Appl. Mater. Interfaces

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“…The use of this coating material is well documented in previous research (Perrino, De Santis and Febo, 1990;Perrino and Gherardi, 1999;Wittmaack, 2006;Lin et al, 2010). However, the coating procedure was different in this study due to the special characteristic of the porous membrane denuder.…”

Section: Coatingmentioning

confidence: 74%

Development of a Novel Porous Membrane Denuder for SO2 Measurement

Shou

Theodore

et al. 2012

Aerosol Air Qual. Res.

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Conventional denuders made of glass or metal are too heavy and bulky to be used in personal sampling systems. In this study, a portable Porous Membrane Denuder (PMD) was developed for personal sampling. The PMD utilizes the porosity of the membrane material and a configuration of multiple parallel flow channels to reduce the size and weight of the device, while increasing the gas collection efficiency. Four types of PMDs (PMD I, II, III and IV) with increasing numbers of channels and smaller channel openings were constructed and tested. Using 10% sodium carbonate coating and a feed concentration of 1 ppm, PMD Ia's collection efficiency for sulfur dioxide over 8 hours was higher than 99.9%. For a feed concentration of 10 ppm, the 5-hr time-weighted-average collection efficiency for sulfur dioxide was 73.1%, 82.8%, 90.9%, 97.2% for PMD Ib, II, III and IV, respectively, compared with 96.6% of the Glass Honeycomb Denuder (GHD), which has similar structure to PMD IV. However, the weight of PMD IV is only one-tenth of that of the GHD. It is clear that with a similar physical structure, PMDs have similar capacities to traditional Glass Honeycomb Denuders, yet are much lighter and less expensive. This study demonstrates the great potential of this new type of denuder for many applications in the field of environmental and industrial hygiene monitoring. Particle loss fractions of the four types of PMDs in the size range of 1 to 10 μm were also measured and were 2.9%, 5.2%, 5.7% and 7.3%, respectively.

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“…Detrimental effects caused by airborne molecular contaminates (AMCs) is a major concern in cleanroom air quality control, [1][2][3] particularly for a semiconductor fabrication cleanroom that follows stringent cleanroom requirements. The fabrication process is a multiplestep sequence of photo-lithographic (uses light to transfer patterns on a substrate's surface) and chemical processes, which gradually creates electronic circuits onto a wafer's (typically a silicon-based material) surface.…”

Section: Introductionmentioning

confidence: 99%

Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

Lee

Kuo

et al. 2015

Indoor and Built Environment

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Airborne molecular contaminants strongly affect the cleanroom air quality by severely degrading the image quality of semiconductor devices. This study aims to investigate the removal of N-methyl-2pyrrolidone (NMP), an organic alkali compound that commonly appeared in cleanroom environment and used for photoresist stripping in integrated circuit fabrication processes, through adsorption by the citric acid (CA)-modified activated carbon chemical filters. Increase in CA concentration showed positive correlation to the quantity of CA coating but had negative influences on specific surface area. Immersion of carbon particles in solutions containing 3 M CA for 3 h yielded the most chemical modification according to the intensity of carbonyl and hydroxyl functional groups attached onto the carbon surface. NMP adsorption breakthrough studies demonstrated that NMP adsorption by virgin activated carbon was ineffective. Increase in the extent of CA modification resulted in greater adsorption capacity of NMP owing to increased quantity of carbonyl functional groups on its surface. Binary-component adsorption tests involving NMP and toluene vapours revealed that the CA-modified filters had little adsorption capability for toluene as compared to virgin filters. On the other hand, NMP was competitively favourable for adsorption on CA-modified filters, even when these filters were pre-saturated with toluene. The results of this research could be of value to cleanroom or building maintenance operators for technical and environmental improvements in future system design.

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Analysis of Relationship between Inorganic Gases and Fine Particles in Cleanroom Environment

Cited by 13 publications

References 30 publications

A Microporous Amic Acid Polymer for Enhanced Ammonia Capture

A Microporous Amic Acid Polymer for Enhanced Ammonia Capture

Development of a Novel Porous Membrane Denuder for SO2 Measurement

Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

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