2003
DOI: 10.1016/s0584-8547(03)00217-9
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Analysis of organic contaminants on Si wafers with TXRF-NEXAFS

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Cited by 28 publications
(15 citation statements)
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“…Recently, total reflection has also been combined with extended X-ray absorption fine structure (EXAFS) [36][37][38], and with X-ray absorption near edge-structure (XANES) also called NEXAFS [39][40][41]. These methods are performed with synchrotron excitation.…”
Section: Trends Of Txrf In Surface-and Thin-layer Analysismentioning
confidence: 99%
“…Recently, total reflection has also been combined with extended X-ray absorption fine structure (EXAFS) [36][37][38], and with X-ray absorption near edge-structure (XANES) also called NEXAFS [39][40][41]. These methods are performed with synchrotron excitation.…”
Section: Trends Of Txrf In Surface-and Thin-layer Analysismentioning
confidence: 99%
“…Furthermore, it allows the extension of XAS to the trace element level in droplet samples, where only small amounts are available 4,5 and even in the low energy range, but by using a plane grating monochromator. 9 Various publications describing the method of x-ray absorption analysis for the speciation of arsenic in samples with As concentrations in the ppm range can be found Ł Correspondence to: F. Meirer, Atomic Institute, Vienna University of Technology, Stadionallee 2, A-1020 Vienna, Austria. E-mail: fmeirer@ati.ac.at in the literature.…”
Section: Introductionmentioning
confidence: 99%
“…These two bonds could also be suggested from the C1s XPS spectra. A minor peak at 402.2 eV attributes to the N‐O bond [42]. The presence of O species may arise from oxidation of the precursors during the process.…”
Section: Resultsmentioning
confidence: 99%