Analysis of moisture purge in high purity gas distribution systems

Yang, Tian; Wu, Chuan Hsieh; Yeh, Chia Feng

doi:10.1016/j.ijheatmasstransfer.2005.12.004

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Cited by 6 publications

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“…There have been extensive studies on the interaction mechanisms between moisture molecules and gas delivery components and the methods of cleaning moisture contaminated UHP gas distribution systems. However, these studies have typically focused on purging the system under SSP conditions (Dheandhanoo, et al, 1998;Dheandhanoo, et al, 2001;Jurcik et al, 1993;Jurcik et al, 1995;Kubus and Leggett, 1993;Yang, et al, 2006).…”

Section: Introductionmentioning

confidence: 99%

Application of pressure-cycle purge (PCP) in dry-down of ultra-high-purity gas distribution systems

Yao

Wang

Dittler

et al. 2010

Chemical Engineering Science

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Section: Introductionmentioning

confidence: 99%

Application of pressure-cycle purge (PCP) in dry-down of ultra-high-purity gas distribution systems

Yao

Wang

Dittler

et al. 2010

Chemical Engineering Science

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Pressure cycling for purging of dead spaces in high‐purity gas delivery systems

et al. 2015

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The purging of stagnant or dead volumes in gas distribution systems is an important method for removing impurities and maintaining cleanliness. A combination of experimental investigation and computational process modeling is used to study the dynamics of impurity removal under variety of purge conditions. The controlled cycling of pressure during purge is found to enhance the cleaning process significantly, particularly in dead spaces. The process simulator was used to develop and analyze a pressure‐cyclic purge (PCP) method and understand the conditions that would make PCP advantageous over steady‐state purge (SSP). In particular, the effect of geometric factors, impurity surface interactions, flow rate, and cycle characteristics on PCP and its comparison with SSP was studied. The advantage of the PCP method, in terms of both purge time and gas usage, becomes more pronounced in systems with larger number and size of dead spaces and impurities that interact strongly with the surfaces. © 2015 American Institute of Chemical Engineers AIChE J, 61: 3973–3980, 2015

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Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process

Huang

2016

Applied Thermal Engineering

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Analysis of moisture purge in high purity gas distribution systems

Cited by 6 publications

References 5 publications

Application of pressure-cycle purge (PCP) in dry-down of ultra-high-purity gas distribution systems

Application of pressure-cycle purge (PCP) in dry-down of ultra-high-purity gas distribution systems

Pressure cycling for purging of dead spaces in high‐purity gas delivery systems

Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process

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