Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process

Hu, Shih−Cheng; Huang, Zhe-Yu; Fu, Ben-Ran

doi:10.1016/j.applthermaleng.2016.07.059

Cited by 12 publications

(6 citation statements)

References 16 publications

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“…It then gradually approached the zero level at the end of the pre-purged process. Such RH evolutions when the door was closed approximately followed the exponential decay, as generally reported in the literature, such as Hu et al [11]. In addition, the RH decreasing characteristics of case A-3 were somewhat different from those of cases A-1 and A-2 during the pre-purged period.…”

Section: Experiments and Apparatussupporting

confidence: 54%

“…Therefore, the difference between our prototype and the commercial FOUP while purging with the door closed is not within the scope of the present study, but it might be interesting and needs to be further studied. the literature, such as Hu et al [11]. In addition, the RH decreasing characteristics of case A-3 were somewhat different from those of cases A-1 and A-2 during the pre-purged period.…”

Section: Experiments and Apparatusmentioning

confidence: 63%

“…For the cases of the conventional-purge and diffuser-purge experiments, the CDA supplied to the FOUP or air curtain, Figure 6 depicts the testing loop of the experiments for the different purge methods in the FOUP. The purge gas for the FOUP and for the air curtain was the CDA generated from the same system, which was also employed in the previous study [11]. The use of the air curtain reduced the moisture entering the purged FOUP (with an initial RH = 0%) when opening its door in the mini-environment, as reported in our previous study [18].…”

Section: Experiments and Apparatusmentioning

confidence: 83%

“…The vacuum method is another efficient way to maintain the cleanliness of a FOUP [9,10]. For example, Hu et al [11] employed a purge or vacuum approach to remove the moisture from a FOUP. Their results demonstrated that a higher purging flow rate using CDA provided better moisture removal.…”

Section: Introductionmentioning

confidence: 99%

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Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment

Lin

et al. 2018

Applied Sciences

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Abstract:Wafers are usually placed in a front opening unified pod (FOUP) while waiting in the line of manufacturing processes; a conventional way for preventing (or removing) contamination is to purge an FOUP with a gas, so as to maintain the cleanliness level. This study investigates the effect of the flow rate of clean dry air (CDA), supplied to the purge system and air curtain, on the moisture prevention performance, while opening the FOUP door in a mini-environment. An initial relative humidity (RH) in the pre-purged FOUP was approximately 0%, whereas an RH in the mini-environment was about 43%. Conventional, diffuser, and panel purge approaches were tested. The results showed that the moisture in the surroundings rapidly entered the FOUP when the door was opened, without using either the purge system or air curtain. When the CDA was then supplied to both the purge system and the air curtain, the RH values decreased significantly; the drop slope of the RH for the diffuser-and panel-purge processes was much larger than that of the conventional-purge process. In addition, the moisture prevention performance when the developed panel-purge system was used was slightly lower than when using the diffuser-purge system. However, the use of the panel-purge method could sufficiently suppress the vibration problem. In the present study, the case with CDA flow rates of 150 L/min to the air curtain and 250 L/min to the panel-purge device had the best moisture prevention performance, because of the smallest values for both the mean and maximum RH values (i.e., 1.3% and 9.5%, respectively) in the FOUP.

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Section: Experiments and Apparatussupporting

confidence: 54%

Section: Experiments and Apparatusmentioning

confidence: 63%

Section: Experiments and Apparatusmentioning

confidence: 83%

Section: Introductionmentioning

confidence: 99%

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Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment

Lin

et al. 2018

Applied Sciences

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“…Due to technological advances in various industries, aerosol transport tracking studies have gained great attention. For example, in the semiconductor industry, it is indispensable to carefully control the particle contamination and figure out the contamination source location to improve the production yields and quality due to reduced minimum pitch size in semiconductor products [ [35] , [36] , [37] , [38] ]. In order to experimentally verify the particle deposition location, fluorescent particles or droplets have been employed.…”

Section: Introductionmentioning

confidence: 99%

Quantitative analysis of droplet deposition produced by an electrostatic sprayer on a classroom table by using fluorescent tracer

Kwak

Kim

Kuehn

et al. 2021

Building and Environment

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Due to the ongoing COVID-19 pandemic situation, measures to mitigate the risk of transmission of the SARS-CoV-2 virus in an indoor setting are urgently needed. Among the various types of disinfectant methods, electrostatic spraying is often applied to decontamination in public places. For quantitatively characterizing electrostatic spraying, we developed the novel evaluation method by using a fluorescent tracer. By applying this method, we performed three different experiment cases (static test on a table, static test on a cylinder, and dynamic test on a table) to figure out its unique characteristics (Coulombic fission and wraparound effect) and measure its performance in various aspects. To be specific, bimodal distribution with peak sizes of ∼10 and ∼100 μm was found due to Coulombic fission. Otherwise, a unimodal distribution with a peak size of ∼100 μm occurred for the uncharged droplets. As a result, the effective contact area increased by 40–80 % due to small progeny droplets. The wraparound effect was examined on two different cylinders: copper (Cu) and polyvinyl chloride (PVC) pipe. When the target surface was not charged (Cu 0 kV and PVC 0 kV), the average normalized concentrations on the backside of the cylinder ( θ = 180°) increased by around 67 % for charged droplets. Meanwhile, when the target surface was highly charged (PVC –19 kV), the average normalized concentrations at θ = 180° were increased more than two times for charged droplets.

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Natural convection flow around heated disk in cubical enclosure

2018

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Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process

Cited by 12 publications

References 16 publications

Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment

Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment

Quantitative analysis of droplet deposition produced by an electrostatic sprayer on a classroom table by using fluorescent tracer

Natural convection flow around heated disk in cubical enclosure

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