Analysis of longitudinal leaky surface acoustic waves on bonded structures consisting of similar and dissimilar materials

Abstract

The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAWs) on structures consisting of a LiTaO3 (LT) thin plate bonded to a quartz (Qz) similar-material bonded structure were investigated theoretically. It was found by surface acoustic wave (SAW) propagation analysis that a small attenuation can be obtained by combining an LT thin plate and a Qz similar-material bonded structure with appropriate Euler angles. Furthermore, regarding SAW resonance analysis, resonances with admittance ratios exceeding 50 dB and Q factors exceeding 1,000 were obtained in the LT/Qz/Qz bonded structure. Such a small propagation loss and high Q can be obtained with a larger LT plate thickness than in the case of the LT/Qz bonded structure.

Analysis of propagation and resonance properties of longitudinal leaky surface acoustic wave on LiNbO3/SiC bonded structure

“…Longitudinal LSAWs (LLSAWs) with a phase velocity 1.5-2 times higher than that of LSAWs are attracting increasing attention for realizing higher operating frequencies. [1][2][3][4][5][6][7][8][9][10][11] However, it is difficult to obtain effective resonance properties with single substrates of LiTaO 3 (LT) or LiNbO 3 (LN) owing to the radiation of shear vertical (SV) and shear horizontal (SH) bulk waves into the substrate.…”