Analysis of propagation and resonance properties of longitudinal leaky surface acoustic wave on LiNbO3/SiC bonded structure
Ryo Takei,
Masashi Suzuki,
Shoji Kakio
et al.
Abstract:The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAW) on a bonded structure comprising an X-cut LiNbO3 (LN) thin plate and a 4H-SiC support substrate are theoretically investigated. The strong LLSAW responses with high Q factors were obtained at the LN thin-plate thickness h where the LLSAW phase velocity was slower than the bulk shear wave of 4H-SiC of 7126 m/s, and a fractional bandwidth (FBW) of 9–10% was obtained for the normalized Al film thickness by wavelength h… Show more
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