Analysis of large-area beam attacks on surfaces and testing of etching reactions

Janes, Joachim; Bänziger, U.; Huth, Christoph; Hoffmann, Peter M.; Neumann, Gregory M.; Scheer, Hella-Christin; Schneemann, B.; Köhler, Uwe

doi:10.1063/1.1142741

Cited by 14 publications

(3 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…3,4,7 Several other authors have presented measurements using differentially pumped ion energy analyzers in conjunction with quadrapole mass spectrometers. 12,13,17,18,22,24 The use of differential pumping for ion energy measurements can be problematic because of the spatial requirements of the additional equipment, which are often incompatible with preexisting plasma reactor components, particularly those used in industry. Ingram and Braithwaite designed and built a compact ion energy analyzer that did not require differential pumping and were able to measure ion energy distributions in a capacitively coupled plasma reactor.…”

Section: Previous Workmentioning

confidence: 99%

“…They recorded ion angular distributions by varying the detection angle of the mass spectrometer. 24 Most recently, ion angular distribution measurements have been made in high density plasma reactors on grounded electrodes by Woodworth et al [19][20][21] and Aydil et al 23 The objective of this research is to design and develop a compact ion energy analyzer capable of measuring the energy distributions of ions impinging on the rf-biased electrostatic chuck of an industrial high density plasma reactor. The difficulties associated with measuring the energies of ions impinging on rf-biased substrates have strongly limited the experimental studies of these systems.…”

Section: Previous Workmentioning

confidence: 99%

See 1 more Smart Citation

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Edelberg

Perry

Benjamin

et al. 1999

Review of Scientific Instruments

View full text Add to dashboard Cite

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode Rev. Sci. Instrum. 79, 033502 (2008); 10.1063/1.2890100 Measurement of ion energy distributions using a combined energy and mass analyzer Rev. Sci. Instrum. 78, 083503 (2007); 10.1063/1.2769352Ion energy distributions versus frequency and ion mass at the rf-biased electrode in an inductively driven discharge J.A compact floating retarding-field ion energy analyzer and the accompanying electronics have been designed and built to measure the energy distribution of ions bombarding radio-frequency ͑rf͒ biased electrodes in high-density plasma reactors. The design consists of two main components, a compact retarding field vacuum probe and an integrated stack of floating electronics for providing output voltages, measuring currents and voltages and transmitting data to a computer. The operation and capabilities of the energy analyzer are demonstrated through ion energy distribution measurements conducted on a 4 MHz rf-biased electrostatic chuck in a 13.56 MHz high-density transformer coupled plasma ͑TCP͒ reactor. The analyzer is capable of operating while floating on several hundreds of volts of rf bias and at pressures up to 30 mTorr without differential pumping. The effects of pressure ͑2-30 mTorr͒, TCP power ͑500-1500 W͒, rf-bias power ͑0-800 W͒, gas composition, and ion mass on the ion energy distributions are demonstrated through Ar, Ne, and Ar/Ne discharges.

show abstract

Section: Previous Workmentioning

confidence: 99%

Section: Previous Workmentioning

confidence: 99%

Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Edelberg

Perry

Benjamin

et al. 1999

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…Zeuner et al performed IED measurements at the RF driven electrode by a suitable choice of spacing and dc potential difference between orifice and ion optics [22]. Janes et al also made the IED measurements using an RF shielding with the same dc potential with that of the driven electrode [23]. However, Mizutani and Hayashi, who referred to these techniques as 'dc mode', pointed out that the 'dc mode' techniques are not fully validated in the case of the rf driven electrode and that the rf driven sampling method is indispensable for the measurements of the correct ion energy on the rf driven electrode [24].…”

Section: Introductionmentioning

confidence: 99%

Effects of phase regulation on ion energy distribution in RF bias sputtering

Tsuda

Tatebayashi

Takamura

et al. 1999

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

Ion energy distributions (IEDs) at a radio frequency (RF) driven substrate electrode were measured in an rf (13.56 MHz) bias sputtering system with a phase shifting unit for regulating the two rf voltages applied to the target (upper) and the substrate (lower) electrodes. Without the regulation, the IED was of a centrally peaked shape, not of a bimodal shape which is a characteristic of ions accelerated across an RF sheath, while the IED with the regulation showed a strongly asymmetric bimodal saddle shape. Moreover, it was found that the energy spread and asymmetry of IEDs and the ion current varied with the phase angle difference, and were correlated with the measured sheath thickness variation. These results were discussed with a simple collisionless oscillating sheath model.

show abstract