Handbook of Advanced Plasma Processing Techniques 2000
DOI: 10.1007/978-3-642-56989-0_5
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Overview of Plasma Diagnostic Techniques

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Cited by 9 publications
(7 citation statements)
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“…The theories of a plasma probe are not as trivial as its construction. A number of theories are presented to explain the physical mechanisms responsible for the operation [2][3][4][5][6]15]. When probe is inserted into the plasma, it is biased with different positive and negative voltages to draw a characteristic curve between the applied probe voltage and the output current shown in figure 1.…”
Section: Theory and Calculationsmentioning
confidence: 99%
See 2 more Smart Citations
“…The theories of a plasma probe are not as trivial as its construction. A number of theories are presented to explain the physical mechanisms responsible for the operation [2][3][4][5][6]15]. When probe is inserted into the plasma, it is biased with different positive and negative voltages to draw a characteristic curve between the applied probe voltage and the output current shown in figure 1.…”
Section: Theory and Calculationsmentioning
confidence: 99%
“…Inverse plasma frequency corresponds to the plasma response time to local perturbation. This is also referred as a distance traveled by a thermal electron to cover a distance of Debye length [2][3][4][5][6].…”
Section: Theory and Calculationsmentioning
confidence: 99%
See 1 more Smart Citation
“…A small amount of Ar ͑3.2 vol %͒ was added to the CF 4 /O 2 mixture for argon actinometry measurements, one of the plasma diagnostic methods. 9 It has been demonstrated that the addition of Ar in a small quantity (Ͻ5 vol %) does not perturb the discharge properties of a CF 4 /O 2 mixture. 10,11 Mass spectra of the downstream effluent of the plasma were collected using a conventional quadrupole mass spectrometer ͑QMS; ULVAC, MSQ-300͒ which was operated at a fixed electron impact energy of 70 eV.…”
Section: Apparatus and Techniques For Corrosion Testmentioning
confidence: 99%
“…In contemporary research, the focus is given to the development of plasma-treated seeds and to meet the challenges to increase food production and ensure food safety. Plasma originally being searched as fusion energy has been currently used in medicine, agriculture, surface modifications, pollution control, electronics, water sterilization, etc [4][5][6][7][8][9][10]. Plasma treatment has resulted in the establishment of a distinct, quickly expanding area known as 'plasma agriculture' in today's world.…”
Section: Introductionmentioning
confidence: 99%