Analysis of intrinsic damping in vibrating piezoelectric microcantilevers

Qiu, Huacheng; Ababneh, A.; Feili, Dara; Wu, Xuezhong; Seidel, Helmut

doi:10.1007/s00542-015-2510-y

Cited by 6 publications

(7 citation statements)

References 24 publications

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“…They fabricated piezoelectric and electrode coated cantilever beams with 20% to 100% length coverage. As shown in Table 3, the coating loss of a 20 kHz flexural mode resonator can be reduced by decreasing the coating coverage [52]. The result shows that the resonator with 20% coating coverage can increase the quality factor from 3000 to 8000 compared with the full coverage resonator.…”

Section: Other Lossesmentioning

confidence: 92%

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Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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Section: Other Lossesmentioning

confidence: 92%

“…Friction between each layer causes energy loss as the resonator vibrates. H. Qiu concluded that coating loss may be the main reason that the quality factor of piezoelectric resonators is lower than that of capacitive resonators [52]. They fabricated piezoelectric and electrode coated cantilever beams with 20% to 100% length coverage.…”

Section: Other Lossesmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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“…The energy loss Q À1 for a resonator consists of intrinsic energy loss Q int À1 (e.g., radiation of elastic energy into attachment and structural friction) [16] and external losses Q flu À1 (e.g., acoustic, viscous, and squeeze-film damping) into the surrounding fluid. Q int À1 can be measured by operating the resonator in a high vacuum.…”

Section: Introductionmentioning

confidence: 99%

“…Figure16. Evolution of the Q factors as a function of f r /(rη) for different gases and resonant modes at atmospheric pressure.…”

mentioning

confidence: 99%

Hydrodynamic Loading on Vibrating Piezoelectric Microresonators

Qiu¹,

Seidel²

2018

Piezoelectricity - Organic and Inorganic Materials and Applications

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The dynamics of micro-piezoelectric resonators can be profoundly affected by immersion in fluids. Aluminum nitride-based piezoelectric microresonators are fabricated and tested under controlled pressures in several gases. The cases on microresonator vibrating in fluid can be broadly divided into: (i) those that deal with vibration in free space and (ii) close to a surface. For the first case, experimental and analytical results for the hydrodynamic loading characteristics of the resonators at different resonant modes have been investigated, as well as the influences of fluid viscosity and compressibility. For the second case, most prior efforts have been focused on squeeze-film damping with very narrow gaps, while in many practical applications, the resonators vibrate close to a surface with a moderate distance. Experiments by using a micro-bridge resonator with a big range of gaps are performed and compared with predictions from theoretical models.

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“…Nourmohammadi [10] established the thermoelastic coupling response spectrum of the piezoelectric composite beam. Qiu and other [11] used analytical method, On the basis of previous work, this paper establishes piezoelectric thermoelastic coupling governing equations under different vibration. By the method of numerical calculation and simulation, the relationship between the piezoelectric output characteristics and the vibration modes is studied, and the effects of piezoelectric thermoelastic coupling on thermoelastic damping and frequency shift are researched, which means the influence of the temperature field on the piezoelectric structure under different vibration modes is obtained.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric thermoelastic dissipation research of piezoelectric harvester under different vibration

Liu

Deng

et al. 2018

MATEC Web Conf.

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Piezoelectric materials are widely used to form piezoelectric energy harvesters. Also, the thermoelastic dissipation always influences the energy harvesting efficiency, during the energy harvest process. Therefore, in this paper, we discuss the effect of thermoelastic dissipation on the piezoelectric harvester through numerical calculation, simulation and experiment. The piezoelectric thermoelastic coupling governing equations under different vibration are derived, which are based on the Euler-Bernoulli beam theory, thermal conduction model and piezoelectric field model. Then, the structure frequency shift and thermoelastic damping are studied via numerical calculation and simulation. Meanwhile, we show the influence of the temperature field on the piezoelectric structure under different vibration modes. Furth more, we research the variations of piezoelectric structure thermoelastic dissipation characteristics under different structure geometry sizes. Based on these analyses, the effect of piezoelectric thermoelastic dissipation on the piezoelectric harvester is researched

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Analysis of intrinsic damping in vibrating piezoelectric microcantilevers

Cited by 6 publications

References 24 publications

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Hydrodynamic Loading on Vibrating Piezoelectric Microresonators

Piezoelectric thermoelastic dissipation research of piezoelectric harvester under different vibration

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