2021
DOI: 10.1007/s00542-020-05193-x
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Analysis of integrated silicon nitride lab-on-a-chip optofluidic sensor at visible wavelength for absorbance based biosensing applications

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Cited by 5 publications
(3 citation statements)
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“…These WGs can be used for various sensing applications, including biochemical sensing, environmental monitoring, and gas sensing. The evanescent field of light propagates through the WG interacts with the surrounding environment, allowing sensitive detection of changes in refractive indices or molecular interactions [34].…”
Section: Silicon Nitride (Si 3 N 4 )mentioning
confidence: 99%
“…These WGs can be used for various sensing applications, including biochemical sensing, environmental monitoring, and gas sensing. The evanescent field of light propagates through the WG interacts with the surrounding environment, allowing sensitive detection of changes in refractive indices or molecular interactions [34].…”
Section: Silicon Nitride (Si 3 N 4 )mentioning
confidence: 99%
“…Several are the optical bio/sensor configurations that have been realized through optical fibers or planar waveguides. Optical sensors integrated on silicon-based substrates find uses in gas sensing (Siebert and Müller, 2005;Airoudj et al, 2008;Huang et al, 2014;Consani et al, 2018;Maurya et al, 2018), magnetic field sensing (Deghdak et al, 2017;Ge et al, 2021), detection of biological, and chemical species (Densmore et al, 2007;Mukundan et al, 2009;Schmitt et al, 2011;Kozma et al, 2014;Kumar et al, 2021). Moreover, these sensors offer all the advantages of the technological and fabrication processes typical of the microelectronic industry, such as the integration with other components, the low-cost, and the small-size of the produced device.…”
Section: Introductionmentioning
confidence: 99%
“…In the scientific literature, several configurations exist, based on planar slab waveguide integrated on silicon (Si)-based substrate used for multiple applications, like gas sensing [ 18 , 19 , 20 , 21 , 22 ], magnetic field sensing [ 23 , 24 ], biological and chemical species detection [ 2 , 6 , 25 , 26 , 27 ], and so on. These platforms take advantage of the technological and fabrication processes of the microelectronic industry.…”
Section: Introductionmentioning
confidence: 99%