Six diamond coatings were produced by microwave plasma-assisted chemical vapour deposition ( M W PACVD) on polished S i c substrates.Process gas pressure and process gas composition were varied systematically, resulting in different coating morphologies, roughnesses and grain sizes.Friction and wear were investigated for unlubricated vibrating contact conditions in air at room temperature. Tribological tests on diamond coatings were performed in a ball-on-disc configuration, with steel balls (100Cr6) and alumina balls acting as counterbodies. For comparison of the tribological performance of the diamond coatings, standard tests were performed with a stroke of 200 pm, a load of 10 N, and a frequency of 20 Hz. The effect of relative humidify (RH) was investigated by testing in dry (3% RH), in normal (50% RH), and in moist air (1 00% RH), respectively To investigate running-in effects and wear propagation, the test duration (lo4, lo5, and 1.2.106 sliding cycles) was varied.For steelldiamond pairings, high wear at the steel ball and high friction were measured, influenced by roughness and grain size of the diamond coating and by relative humidity. For A1203 against diamond, a pronounced running-in of friction and wear was found. High friction and high wear at the beginning of each test are followed by a stationa y phase with extremely low friction coefficients (I 0.05) and with wear rates below the limit of resolution. This running-in depends on grain size and roughness of the coating, on relative humidity, as well as on the operational parameters. Surface analysis using SEM, EDX, LRS and A F M was conducted, to investigate tribologically induced surface changes. diamond coatings, chemical vapour deposition, M W PACVD, vibrating contacts, steelldiamond pairings, running-in, wear, S E M , E D X ,