Analysis of Bending Displacement of Lead Zirconate Titanate Thin Film Synthesized by Hydrothermal Method

Ohba, Yasuo; Miyauchi, Masahiro; Tsurumi, Takaaki; Daimon, Masaki

doi:10.1143/jjap.32.4095

Cited by 91 publications

(38 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The ferroelectric domain motion still was cramped by these defects and large stress. These properties were comparable with that of a PZT layer deposited by conventional thin film methods [15][16][17][18][19][20][21]. Figure 6 summarizes recovering of ferroelectric property on PZT film by annealing at various temperatures for AD method compared to conventional process.…”

Section: Recovering Of Ferroelectric and Piezoelectric Properties By mentioning

confidence: 52%

Microstructure of Ceramic Thick Film Formed by Aerosol Deposition and Its Applications to Microactuator

Akedo

2006

Integrated Ferroelectrics

View full text Add to dashboard Cite

Microstructure of PZT thick layer formed on strain steel substrate via a room temperature impact consolidation (RTIC) of fine ceramic powder using Aerosol Deposition (AD) with post heat treatment were investigated in order to fabricate a micro actuator. An optical micro scanner, having a high speed performance with a resonance frequency of over 20 kHz and scan angle of over 20 degree in atmospheric ambient, was successfully fabricated. The piezoelectric thick layer was directly deposited onto the metal scanner structure, which was fabricated by mechanical punching. This method is a powerful tool to realize ceramic integration with metal components.

show abstract

Section: Recovering Of Ferroelectric and Piezoelectric Properties By mentioning

confidence: 52%

Microstructure of Ceramic Thick Film Formed by Aerosol Deposition and Its Applications to Microactuator

Akedo

2006

Integrated Ferroelectrics

View full text Add to dashboard Cite

show abstract

“…The polycrystal structure is a distinctive feature of the material of this process. The piezoelectric factor d 31 of deposited ®lm was measured using the bimorph element [6,9]. Deformation was estimated based on the measurement of the vibration amplitude at low frequency drive.…”

Section: Hydrothermal Deposition Of Pzt Filmmentioning

confidence: 99%

Performance of hydrothermal PZT film on high intensity operation

Kurosawa

Yasui

Kanda

et al. 2001

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

The deposition processes of PZT thin ®lms have been described in many reports, yet there have been no descriptions of the performance of PZT ®lms at high intensity operation. Hydrothermally-deposited PZT ®lm transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT ®lm expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using ®lms formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the ®lm was 38 mm and the driving voltage was 145 V p±p . This velocity value was much larger than bulk PZT materials for high power applications. #

show abstract

“…the thickness of the resultant films were usually less than 1 m. There are some reports on fabrication of PZT thick films by sol-gel method, screen-printing method, sputtering method and hydrothermal synthesis method [5,6]. The screen-printing method is especially useful for a high productivity and good cost performance which brings the films to the stage of commercial mass production [7].…”

Section: Introductionmentioning

confidence: 99%