“…Abrasive jet micromachining (AJM) has been considered as one of the most appropriate micromachining technologies for hard and brittle materials, such as ceramics and semiconductors [1,2]. Owing to its various distinct advantages, such as negligible heat affected zone, small cutting forces, high machining versatility and high flexibility, AJM has been used in fabricating electronic devices and micro-fluidic channels in recent years, where damage-free micro-part features are required.…”