Analysis and Kinetics of Transient Species in Electrode Near Plasma and Plasma Boundary Sheath of RF Plasmas in Molecular Gases

Geigl, Martin; Peters, Sebastian; Gabriel, Onno; Krames, B.; Meichsner, Jürgen

doi:10.1002/ctpp.200510042

Cited by 17 publications

(8 citation statements)

References 21 publications

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“…In the case of SiO 2 , the radial profile is in accordance with previous works which have measured the radially resolved fluorescence of atomic oxygen using TALIF in a similar system, albeit with a different surface material. 61,62 The decreased dissociation degree at the electrode edge is most likely related to a decreasing electron density in this region due to radial diffusion of electrons towards the chamber walls and therefore lower electron impact dissociation rates.…”

Section: Radial Distribution Of Dissociation Degree and Local Meamentioning

confidence: 99%

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Tsutsumi

Greb

Gibson

et al. 2017

Journal of Applied Physics

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Energy Resolved Actinometry is applied to simultaneously measure the radially resolved oxygen dissociation degree and local mean electron energy in a low-pressure capacitively coupled radio-frequency oxygen plasma with an argon tracer gas admixture. For this purpose, the excitation dynamics of three excited states, namely, Ar(2p1), O(3p3P), and O(3p5P), were determined from their optical emission at 750.46 nm, 777.4 nm, and 844.6 nm using Phase Resolved Optical Emission Spectroscopy (PROES). Both copper and silicon dioxide surfaces are studied with respect to their influence on the oxygen dissociation degree, local mean electron energy, and the radial distributions of both quantities and the variation of the two quantities with discharge pressure and driving voltage are detailed. The differences in the measured dissociation degree between different materials are related back to atomic oxygen surface recombination probabilities.

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Section: Radial Distribution Of Dissociation Degree and Local Meamentioning

confidence: 99%

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Tsutsumi

Greb

Gibson

et al. 2017

Journal of Applied Physics

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“…To quantitatively acquire the atomic oxygen ground state densities spatially resolved TALIF can be applied [17]. Here, this technique is based on the excitation of ground state atoms by simultaneous absorption of two laser photons at a wavelength of 225 nm and subsequent observation of the fluorescence at 845 nm in a perpendicularly oriented optical setup with a gated photomultiplier.…”

Section: Two-photon Absorption Laser-induced Fluorescencementioning

confidence: 99%

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Gathen¹,

Schaper²,

Knake³

et al. 2008

J. Phys. D: Appl. Phys.

113

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Despite enormous potential for technological applications, fundamentals of stable non-equilibrium micro-plasmas at ambient pressure are still only partly understood. Micro-plasma jets are one sub-group of these plasma sources. For an understanding it is particularly important to analyse transport phenomena of energy and particles within and between the core and effluent of the discharge. The complexity of the problem requires the combination and correlation of various highly sophisticated diagnostics yielding different information with an extremely high temporal and spatial resolution. A specially designed rf microscale atmospheric pressure plasma jet (µ-APPJ) provides excellent access for optical diagnostics to the discharge volume and the effluent region. This allows detailed investigations of the discharge dynamics and energy transport mechanisms from the discharge to the effluent. Here we present examples for diagnostics applicable to different regions and combine the results. The diagnostics applied are optical emission spectroscopy (OES) in the visible and ultraviolet and two-photon absorption laser-induced fluorescence spectroscopy. By the latter spatially resolved absolutely calibrated density maps of atomic oxygen have been determined for the effluent. OES yields an insight into energy transport mechanisms from the core into the effluent. The first results of spatially and phase-resolved OES measurements of the discharge dynamics of the core are presented.

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“…In pulsed rf plasmas the rise time of the plasma induced emission of atomic oxygen was compared with that of the increasing ground state density of atomic oxygen by means of two photon absorption laser induced fluorescence (TALIF, [20]), see figures 7(a) and (b).…”

Section: Spatio-temporally Resolved Emission Patternmentioning

confidence: 99%

Radio-frequency discharges in oxygen: II. Spatio-temporally resolved optical emission pattern

Dittmann¹,

Drozdov²,

Krames³

et al. 2007

J. Phys. D: Appl. Phys.

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Axially and temporally resolved optical emission structures were investigated in the rf sheath region of a parallel plate capacitively coupled rf discharge (13.56 MHz) in pure oxygen and tetrafluoromethane. The rf discharge was driven at total pressures of between 10 and 100 Pa, gas flow rate of 3 sccm and rf power in the range 5–100 W. In particular, the emission of the atomic oxygen at 844.6 nm (3p3P → 3s3S0) and the atomic carbon at 193 nm (3s1P0 → 2p1D) were imaged with a lens onto the entrance slit of a spectrometer and detected by a fast ICCD-camera. The spatio-temporally resolved analysis of the emission intensity during the rf cycle (73.75 ns) provides two significant excitation processes inside the rf sheath: the electron impact excitation at the sheath edge, and heavy particle impact excitation in front of the powered electrode. In oxygen plasma the emission of atomic oxygen was found in both regions whereas in tetrafluoromethane the emission of atomic carbon was observed only in front of the powered electrode. The experimental results reveal characteristic dependence of the emission pattern in front of the powered electrode on plasma process parameters (self-bias voltage, pressure) and allow an estimation of the excitation threshold energy and effective cross section of energetic heavy particle loss.

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Analysis and Kinetics of Transient Species in Electrode Near Plasma and Plasma Boundary Sheath of RF Plasmas in Molecular Gases

Cited by 17 publications

References 21 publications

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Radio-frequency discharges in oxygen: II. Spatio-temporally resolved optical emission pattern

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