Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback

Li, Jianli; Fang, Jiancheng; Du, Mingyuan; Dong, Haifeng

doi:10.1007/s00542-012-1630-x

Cited by 15 publications

(10 citation statements)

References 10 publications

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“…Известно, что по мере уменьшения размеров прибора имеет место возрастание дрейфа нуля [53]. Также именно в микро-ГГ отношение шум/ сигнал растет, если масса и размеры ПМ умень-шаются [54][55][56]. В частности, известно, что при уменьшении размеров токопроводящих элемен-тов растет и 1/f -шум [74].…”

Section: проблемы создания малогабаритных и дешевых гравитационных грunclassified

STAGES OF DEVELOPMENT AND STATE OF ENGINEERING OF GRAVITY GRADIOMETERS FOR MOVING OBJECTS. (Review)

Dzhilavdari¹,

Ризноокая²

2016

Prib. metody izmer.

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Section: проблемы создания малогабаритных и дешевых гравитационных грunclassified

STAGES OF DEVELOPMENT AND STATE OF ENGINEERING OF GRAVITY GRADIOMETERS FOR MOVING OBJECTS. (Review)

Dzhilavdari¹,

Ризноокая²

2016

Prib. metody izmer.

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“…Nasiri et al [4] realized a MEMS angular accelerometer based on a conventional mass-spring system for measurements in three directions. A different approach is made by Li et al [5], in which they propose to use a pendulum-based accelerometer.…”

Section: Introductionmentioning

confidence: 98%

An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

Groenesteijn

Droogendijk

Boer

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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“…Third problem is the noise generated inside the instrument [20]. It is known, that with decreasing device size, there is an increase in the zero drift and in the ratio noise/signal [10][11][12][13]. In particular, the growth of the 1/f noise with a decrease in the size of the conductive elements is known [14].…”

Section: Introductionmentioning

confidence: 99%

Parametric Amplification of the Signals in the Electrostatic Graviinertial Sensor

Gilavdary¹,

Mekid²,

Riznookaya³

2017

Prib. metody izmer.

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The challenges of designing simple, reliable, and high sensitivity graviinertial sensors are investigated. The sensor comprises a proof mass (PM) and is fixed with the housing by the elastic torsion suspension. PM makes small rotations under the action of gravitational forces or inertial forces.The distinctive features of the sensor are that the differential electrostatic system provides simultaneous reading of the desired signal and a control the torsional rigidity of suspension. In addition, the PM's rotational angular velocity transforms in the alternating current flowing through the capacitors. The presence of аlternating current (AC) voltage sources allows to get the parametric amplification of AC and significantly to improve the sensitivity of the sensor. In the simplest case, the sensor does not contain any feedback circuits.As an example, calculations of the micromechanical linear accelerations confirm that the periodic modulation of the coefficient of elastic stiffness of the suspension can significantly increase the sensitivity in the low frequency range, even in the absence of parametric resonance.Conditions for suppressions of background current participating in the output signal from a parametric pumping due to the asymmetry of the differential circuits are set. The frequency characteristics calculations of the sensor were carried out. It is expected, that the proposed sensor design ensures minimum noise level, which can be achievable in the graviinertial sensors. This design and the constructed theory can serve as a basis for creating a wide range of graviinertial devices operating on a movable base, for example, linear and angular accelerometer, gravity gradiometer, gravimeters, and inclinometers, which can be realized in the hybrid and in the micromechanical versions.

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Analysis and fabrication of a novel MEMS pendulum angular accelerometer with electrostatic actuator feedback

Cited by 15 publications

References 10 publications

STAGES OF DEVELOPMENT AND STATE OF ENGINEERING OF GRAVITY GRADIOMETERS FOR MOVING OBJECTS. (Review)

STAGES OF DEVELOPMENT AND STATE OF ENGINEERING OF GRAVITY GRADIOMETERS FOR MOVING OBJECTS. (Review)

An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

Parametric Amplification of the Signals in the Electrostatic Graviinertial Sensor

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