Analysis and Compensation of Cross-Axis Sensitivity in Low-Cost MEMS Inertial Sensors

Hiller, Tobias; Blocher, Lukas; Vujadinović, Miloš; Pentek, Zsigmond; Buhmann, Alexander; Roth, Hubert

doi:10.1109/inertial51137.2021.9430454

Cited by 11 publications

(1 citation statement)

References 7 publications

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“…According to reference [23], the maximum allowable range of cross-axis sensitivity is approximately 5.0%; in the case of MEMS-based IMU sensors, the cross-axis sensitivity has typically been maintained at ±2.0%. The FBG linear/angular acceleration sensor therefore exhibited relatively high levels of cross-axis sensitivity, but this could be sufficiently compensated for using signal processing [24].…”

Section: Evaluation As An Acceleration Sensormentioning

confidence: 99%

Investigation of FBG Linear/Angular Acceleration Sensor for Novel Type Inertial Measurement

Kim

Jang

Kim³

et al. 2023

IEEE Trans. Ind. Electron.

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A novel inertial measurement unit (IMU) was proposed to measure the three-axis linear/angular acceleration of a body using six fiber Bragg grating (FBG) optical fiber acceleration sensors sharing the same rotational center. The six acceleration sensors were shown to accurately distinguish between movements in different directions using a vibration generator and rotary motor/encoder device. The results also indicated that the measurement range of the FBG linear acceleration sensor was ±14 g, its average sensitivity was approximately 229.4 pm/g, and its nonlinearity was under 0.05%. Furthermore, the average sensitivity and nonlinearity of the FBG angular acceleration sensor were 21°/s²/pm and 0.23%, respectively. When measuring linear and angular acceleration, the cross-axis sensitivity of the IMU was within 2.0%. The measurement accuracy of the roll and pitch angle during 360° rotation as well as that of the yaw angle during 720° rotation were both in the range of 0.54 to 1.31%. Most of results indicated that the FBG-based IMU sensor was within the performance specifications of an equivalent conventional IMU sensor. Thus, the concept underlying the proposed sensor can be confidently used as a basis to develop a high-precision IMU sensor that is unaffected by electromagnetic interference.

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Section: Evaluation As An Acceleration Sensormentioning

confidence: 99%