Analysis and Characterization of a High-Performance Ka-Band Surface Micromachined Elevated Patch Antenna

Abstract

Abstract-A novel Ka-band surface micromachined air-elevated patch antenna is designed, fabricated and characterized. It demonstrates a 10.5% 10-dB fractional bandwidth and 9.5 dBi directivity for an elevation of 600 µm. The elevated patch is fed by a vertical epoxy-core metal-coated micromachined probe and supported by several epoxy posts underneath. By the unique feeding technique and the substrate removal approach that are presented in this paper, the performance degradation for traditional microstrip antenna directly built on high-ε r substrate can be significantly alleviated.

A High-Performance Aperture-Coupled Patch Antenna Supported by a Micromachined Polymer Ring

“…The wideband operation was achieved by optimally tuning resonance associated with the coupling slot by optimizing its dimensions. The bandwidth of the antenna device was determined to be %, almost a factor of 2 larger than the figure of 10.5% obtained for the probe fed device [1]. The high-gain patch antenna and the associated method of integration onto microwave substrates could have potentially important applications in the emerging field of UWB networks.…”

“…This has attracted significant research effort in developing high performance antenna devices using alternative fabrication methods. The shown that the gain and efficiency of antennas can be improved considerably by using partial and complete substrate independent antenna designs [1]. This is achieved by creating an air gap or cavity between the substrate surface and the radiating patch [1]- [3].…”

“…The shown that the gain and efficiency of antennas can be improved considerably by using partial and complete substrate independent antenna designs [1]. This is achieved by creating an air gap or cavity between the substrate surface and the radiating patch [1]- [3]. In these devices the air gap is created using polymer or metallic posts [1], [4], [5] and the cavity is produced by micromachining of the silicon substrate.…”

“…This is achieved by creating an air gap or cavity between the substrate surface and the radiating patch [1]- [3]. In these devices the air gap is created using polymer or metallic posts [1], [4], [5] and the cavity is produced by micromachining of the silicon substrate. Membrane-based L-band patch antennas have also been reported recently for light weight applications [6], [7].…”

“…A polymer ring was used to produce the air cavity between the patch and the substrate for high-gain operation. The ring supported patch is more robust that the post supported design [1]. The use of low cost polymer for cavity construction is a significant advantage over the micromachined silicon in producing millimeter scale air gaps for high-gain operation.…”