2007
DOI: 10.1109/led.2007.909838
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An Unassisted, Low Trigger-, and High Holding-Voltage SCR (uSCR) for On-Chip ESD-Protection Applications

Abstract: A new silicon-controlled rectifier (SCR) is proposed and realized in a 0.35-µm/3.3-V fully salicided BiCMOS process for electrostatic-discharge (ESD) applications. Without using an external trigger circuitry, the unassisted SCR has a trigger voltage as low as 7 V to effectively protect deep-submicrometer MOS circuits, a holding voltage higher than the supply voltage to minimize transient influence and avoid latch-up issue, and a second snapback current density exceeding 60 mA/µm to provide robust ESD-protectio… Show more

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Cited by 20 publications
(4 citation statements)
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“…Various researches have been carried out based on the conventional ESD protection structures such as diode, metal-oxide-semiconductor (MOS) and silicon controlled rectifier (SCR). [2][3][4][5][6][7][8][9] The diode [2] and gate-grounded NMOS (GGNMOS) [3] are attractive because of their small snapback margin. However, they have poor ESD robustness [4] and need large chip area to reach the required ESD protection level, [5] resulting in the increasing cost.…”
Section: Introductionmentioning
confidence: 99%
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“…Various researches have been carried out based on the conventional ESD protection structures such as diode, metal-oxide-semiconductor (MOS) and silicon controlled rectifier (SCR). [2][3][4][5][6][7][8][9] The diode [2] and gate-grounded NMOS (GGNMOS) [3] are attractive because of their small snapback margin. However, they have poor ESD robustness [4] and need large chip area to reach the required ESD protection level, [5] resulting in the increasing cost.…”
Section: Introductionmentioning
confidence: 99%
“…However, they have poor ESD robustness [4] and need large chip area to reach the required ESD protection level, [5] resulting in the increasing cost. The SCR is usually regarded as a promising ESD protection device due to its strong ESD robustness per unit area [6] and small parasitic effect, [7] whereas it is restrained from wide applications due to the high trigger voltage (V t1 ) [8] and low holding voltage (V h ), [9] which may result in the breakdown or latch-up of protected circuits.…”
Section: Introductionmentioning
confidence: 99%
“…To reduce the trigger voltage of the ESD protection structures, in some designs, ESD implantations have been added, and the ESD robustness can be significantly improved [5,6] . However, the fabrication cost of an IC is also increased due to the additional mask layers and process steps.…”
Section: Introductionmentioning
confidence: 99%
“…Among these typical ESD protection devices, many engineers prefer the silicon-controlled rectifier (SCR) owing to its high current density. Additionally, various studies have attempted to improve the electrical characteristics of SCR with various Si materials [12]- [15]. However, SiC has a critical electric field that is 10 times larger than that of Si, whereas its forward voltage drop is only approximately 3 times that of Si [16].…”
mentioning
confidence: 99%