An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer

Przybyla, Richard J.; Izyumin, Igor; Kline, Mitchell; Boser, Bernhard E.; Shelton, Stefon; Guedes, A.; Horsley, David A.

doi:10.1109/icsens.2010.5690777

Cited by 49 publications

(29 citation statements)

References 8 publications

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“…As presented by Przybyla et al in [5], a common way to describe the interaction of different physical domains is to represent each contribution to the transfer with a suitable equivalent electrical element (see Fig. 3).…”

Section: A Device Working Principlementioning

confidence: 99%

Characterization and operation of different cMUT membranes in air

Caspani

Langfelder

Minotti

et al. 2013

2013 IEEE International Ultrasonics Symposium (IUS)

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Capacitive micromachined ultrasonic transducers (cMUT) have emerged as an alternative technology to piezoelectric transducers. The paper presents characterization measurements of several membranes with different geometries and materials, aimed at an optimization of the membrane configuration for different applications. In parallel, suitable testing and readout electronics have been developed. We report electro-mechanical measurements and in-air uncoupled testing of devices fabricated in a dedicated process, appropriate for shortrange ultrasound transmission.

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Section: A Device Working Principlementioning

confidence: 99%

Characterization and operation of different cMUT membranes in air

Caspani

Langfelder

Minotti

et al. 2013

2013 IEEE International Ultrasonics Symposium (IUS)

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“…2). Although it is possible to measure shorter distances (refer to [7]), the associated problems (limited opening angle, the suppression of multiple reflections with narrowband systems, acoustic impedance matching, etc.) make it currently commercially unfeasible to obtain a high spatial coverage without blind spots in the closest vicinity of the bumper.…”

Section: A Ultrasonic Measurements For Approaching Objectsmentioning

confidence: 99%

Combined Capacitive and Ultrasonic Distance Measurement for Automotive Applications

et al. 2011

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This work presents a sensor fusion concept based on capacitive and ultrasonic techniques for distance measurement in automotive applications. Although ultrasonic sensors are a well accepted technology for distance sensing applications, they reveal drawbacks in the immediate vicinity of a vehicle. Capacitive sensors are suited for distance measurements of up to 0.3 m and may also provide information about the approaching object itself. The measurement range of the proposed fusion concept reaches up to 2 m whereby blind spots are avoided and means for object classification are provided. The feasibility of the approach and its robustness against environmental influences are demonstrated by means of experimental investigations.

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“…The advancements of microelectromechanical systems (MEMS) have produced ultrasonic transducers based on plate flexural mode with good improvements in bandwidth, cost, and yield over the conventional large scale, thickness-mode PZT sensors [2]. In the past two decades, micro fabrication technologies have been utilized to realize both capacitive (cMUTs) and piezoelectric (pMUTs) micromachined ultrasonic transducers with mechanical impedances closely matched to those of the imaging media, resulting in improved bandwidth and system efficiency.…”

Section: Introductionmentioning

confidence: 99%

Highly responsive curved aluminum nitride pMUT

Akhbari

Sammoura

Shelton

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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We have successfully demonstrated highly responsive, curved piezoelectric micromachined ultrasonic transducers (pMUTs) based on a CMOS-compatible fabrication process using AlN (aluminum nitride) as the transduction material. Micro fabrication techniques have been used to control the radius of curvature of working diaphragms from 400~2000 μm and theoretical analysis have been developed for the optimal dimensions of the transducers to boost the electromechanical coupling and acoustic pressure. A prototype device made of a 2µm-thick AlN on a curved diaphragm with a nominal size of 140µm in diameter and a radius of curvature of 1065µm has been fabricated. The measured resonant frequency is 2.19MHz and DC response is 1.1nm/V, which is 50X higher than that of a planar device with the same nominal diameter. As such, this new class of curved pMUTs could dramatically enhance the responses of the state-of-art, planar pMUTs with high electromechanical coupling for various ultrasonic transduction applications, such as gesture recognition and medical imaging.

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An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer

Cited by 49 publications

References 8 publications

Characterization and operation of different cMUT membranes in air

Characterization and operation of different cMUT membranes in air

Combined Capacitive and Ultrasonic Distance Measurement for Automotive Applications

Highly responsive curved aluminum nitride pMUT

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