An ultra thin nitrided oxide gate dielectric formation by using slot plane antenna plasma

Ozaki, Shunsuke; Matsuyama, S.; Sugawara, Takeshi

doi:10.1109/asmc.2003.1194483

Cited by 2 publications

(3 citation statements)

References 3 publications

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“…nMOS-Capacitors were fabricated on B-doped (100) oriented Si substrate (8)(9)(10)(11)(12). After RCA pre-cleaning, a SiO 2 film ( 16A thick) was thermally grown, and was nitrided by the SPA plasma to form a SiON thin film.…”

Section: Methodsmentioning

confidence: 99%

“…To solve these problems, we have developed the slot plane antenna (SPA) plasma nitridation system, [6][7][8] which is based on the original work of the Radial Line Slot Antenna (RLSA) by Ohmi et al 9) In this paper, a systematic study was performed on the SPA plasma nitrided SiON thin films, using SIMS analysis and electrical evaluations of MOS-Capacitor and CMOS-FET.…”

Section: Introductionmentioning

confidence: 99%

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Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Sugawara

Matsuyama

Sasaki

et al. 2005

Jpn. J. Appl. Phys.

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Flame-resistant clothing or fabrics against thermal exposure is a crucial requirement in order to ensure people survivability and to protect the structure. A model-based method was developed to evaluate the thermal performance of flame-resistant fabrics used in protective clothing. The skin simulant sensor is used to determine the heat flux at the skin simulant surface from the elevation of temperature of the skin simulant surface. The heat flux is then applied to a newly developed skin thermal wave model (STWM) instead of Pennes' model, which inherits some questionable physical and physiological aspects, and the Henriques burn integral is incorporated into the new model to predict the level of skin injury. Results of tolerance time from the Stoll criterion method are also compared with those from the Henriques method with two skin models (Pennes' model and STWM) by a thermal protective performance calorimeter. Deviations between the STWM and the traditional Pennes' equation imply that the STWM, which accounts for finite thermal wave propagation, may provide realistic predictions on burn evaluation. The comparison measurements show that the test results by the STWM correlated well with those obtained from the Henriques method with Pennes' model. Therefore, this test method provides a new technique to accurately and precisely characterize the thermal performance of flame-resistant fabrics.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Sugawara

Matsuyama

Sasaki

et al. 2005

Jpn. J. Appl. Phys.

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“…Piezoceramics are a kind of very important functional materials, which have been applied in every corner of human life and production [1][2][3]. Traditional piezoelectric ceramics are mainly PbZrTiO3 (PZT) based binary and ternary ceramics with a series of excellent properties [4,5].…”

Section: Introductionmentioning

confidence: 99%

Phase-transition induced optimization of electrostrain, electrocaloric refrigeration and energy storage of LiNbO3 doped BNT-BT ceramics

Zhang

Liang

Tang

et al. 2020

Ceramics International

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abbreviated as LiNbO3-doped BNT-BT) ceramics possessing many excellent performances (large electrostrain, negative electrocaloric effect and energy storage density with high efficiency) was fabricated by the conventional solid-state reaction method. A large electrostrain (maximum ~ 0.34% at 100 kV/cm and room temperature) with high thermal stability over a broad temperature range (~ 80 K) is obtained at x = 0.03. A large energy storage density (maximum Wenergy ~ 0.665 J/cm 3 at 100 kV/cm and room temperature) with a high efficiency ( ~ 49.3%) is achieved at x = 0.06. Moreover, a large negative electrocaloric (EC) effect (maximum ΔT ~ 1.71 K with ΔS ~-0.22 J/(K kg) at 70 kV/cm)) is also obtained at x = 0.04. Phase transition (from ferroelectric to antiferroelectric and then to relaxor) induced by increasing the doping amount of LiNbO3 plays a very key role on the optimization of these performances. These findings and breakthroughs make the LiNbO3-doped BNT-BT ceramics very promising candidates as multifunctional materials.

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An ultra thin nitrided oxide gate dielectric formation by using slot plane antenna plasma

Cited by 2 publications

References 3 publications

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Phase-transition induced optimization of electrostrain, electrocaloric refrigeration and energy storage of LiNbO3 doped BNT-BT ceramics

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