An ultra-sensitive piezoresistive polymer nano-composite microcantilever platform for humidity and soil moisture detection

Patil, Sushil D.; Adhikari, Arindam; Baghini, Maryam Shojaei; Rao, V. Ramgopal

doi:10.1016/j.snb.2014.06.110

Cited by 42 publications

(28 citation statements)

References 25 publications

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“…detectable Z = 4 Å Min. detectable σ s = 1.4 × 10 −4 Hetero-polymeric cantilever [ 66 ] (2005) Au Immobilization: Au, isolation layer: SU-8, structural layer: SU-8 (2002) Wide rectangle Cantilever: wide rectangle L C = 215 µm, W C = 280 µm, t 4 = 1.5 µm Piezoresistor: meander t 3 = 60 nm, W P = 4–6 µm Nominal resistance, R = 500 Ω V o = 80 µV at σ s = 2 N m −1 and Z = 2 µm *Spring constant = 0.31 N m −1 *Resonant frequency = 17.56 kHz *Δ Z (Nm) −1 = 9.61 nm Hetero-polymeric cantilever [ 226 ] (2006) Au Immobilization: Au, isolation layer: SU-8, structural layer: SU-8 (2002) Wide rectangle Cantilever: wide rectangle L C = 215 µm, W C = 280 µm, t 1 = 20 nm and t total ~ 3.5 µm Piezoresistor: meander t 3 = 60 nm Nominal resistance, R ~ 500 Ω V o = 1 µV at σ s = 20 × 10 −3 N m −1 at V b = 0.5 V *Spring constant = 4.02 N m −1 *Resonant frequency = 40.99 kHz *Δ Z (Nm) −1 = 1.76 nm Complete polymeric cantilever [ 227 ] (2006) CB SU-8 Immobilization and isolation layers: SU-8, structural layer: SU-8 (2002) V-shaped with V-shaped slit Cantilever: V-shaped L C = 250 µm, W C = 100 µm, t 3 = 1.5 µm, and t total ~ 3.5 µm Piezoresistor: V-shaped Nominal resistance, R = 540 kΩ Δ R / R (nm) −1 = 1.12 × 10 −6 Δ R / R (nm) −1 = 7.6 × 10 −3 V b ...…”

Section: Su-8 Polymer-based Piezoresistive Cantilever Sensorsmentioning

confidence: 99%

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A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Section: Su-8 Polymer-based Piezoresistive Cantilever Sensorsmentioning

confidence: 99%

“…Piezoresistive SU-8 cantilevers coated with Fe(III) porphyrin have been demonstrated to detect CO gas with high specificity and sensitivity down to ppm [ 232 ]. Similarly, SU-8 cantilevers coated with polyaniline (PANI) nano-fibers showed good sensitivity toward moisture [ 227 ].…”

Section: Applicationsmentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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“…17 to individual device constraints. 17,18 These sensors need to be stacked in a single probe or their design needs modification for examining the soil moisture profile at different depths. However, stacking these sensors into a single probe will be cumbersome and will spoil the soil matrix, which is highly undesirable for accurate moisture profiling.…”

Section: Introductionmentioning

confidence: 99%

“…Currently, various soil moisture sensors based on different working mechanisms are available such as ground penetration radar (GPR), dual probe heat pulse (DPHP), and surface acoustic wave (SAW) transponder . These sensors are very expensive, incapable to track microscale water dynamics, and mostly restricted to soil–surface moisture measurements due to individual device constraints. , These sensors need to be stacked in a single probe or their design needs modification for examining the soil moisture profile at different depths.…”

Section: Introductionmentioning

confidence: 99%

Graphene Oxide Array for In-Depth Soil Moisture Sensing toward Optimized Irrigation

Siddiqui

Palaparthy

Kalita

et al. 2020

ACS Appl. Electron. Mater.

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A capacitive approach is employed to find moisture of the soil at various depths (4.5−20 cm). The sensor probe having dimensions 22 × 4 × 0.5 cm 3 , embedded with a series of five microsensors (scalable according to the need), is developed using a graphene oxide (GO) sensor array. The measurement electrodes were designed in an interdigitated manner having eight pairs of comblike-shaped fingers with 100 nm thickness and 90 μm spacing. It has been observed that, for black soil, all of the microsensors displayed response in the range of 500−550% when the soil water content is varied from 3.2 to 55.5%. The graphene oxide-based array probe sensor (GO-APS) shows fast response and recovery time of 140 and 20 s, respectively, for 10% soil moisture samples. The soil moisture profile has been monitored up to a scale of 20 cm depth using the fabricated design. In-depth soil moisture profiling shows a maximum deviation of ±2.4% compared with a standard oven-drying method. The lump formation effect in soil mass showed a maximum deviation of ±4% for the GO-APS array. This robust and low-cost GO-APS with high sensitivity is promising for technological advances in agricultural application.

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“…Composite materials based on polymer matrix filled by conductive or magnetic micro/nano particles have shown very interesting mechanical and electrical properties [1][2][3], and are very promising for application in aeronautical, mechanical and civil engineering [4][5][6][7]. In particular, several investigations have highlighted the existence of a giant piezoresistive effect (the electron conductivity can change by 9 orders of magnitude) in composite materials constituted by a silicone matrix filled by conductive microparticles at a volume fraction around percolation threshold [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Magneto-piezoresistivity in iron particle-filled silicone: An alternative outlook for reading magnetic field intensity and direction

Iannotti¹,

Ausanio²,

Lanotte³

2016

Express Polym. Lett.

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Abstract. Elastomagnetic effect (strain induced by magnetic field application) and piezoresistivity (change of electron conductivity due to an induced strain) are coupled in composite materials constituted by magnetic and conductive microparticles into an elastic matrix. On the basis of these effects, the principle of a new method to read magnetization direction changes, in a random sequence, is proposed and experimentally demonstrated. We have produced new composite magnetopiezoresistive samples, constituted of thin chip shaped Fe microparticles inside a silicone matrix, which under an applied magnetic field along their longitudinal axis, undergo an induced strain depending on the local magnetization direction. The resulting resistivity change can be easily detected and used to deduce the local magnetization direction. The magnetization and strain processes are reversible so that after the removal of external magnetizing field the sample is ready for new measurements. A demonstrator prototype has been conceived, produced and tested. The experimental results provide interesting data encouraging to continue the research towards nano-scale devices in order to pursue the intriguing perspective to achieve a magnetic field gradient sensitivity able to reveal magnetization of semipermanent nanomagnets, polarized 'up' and 'down'.

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An ultra-sensitive piezoresistive polymer nano-composite microcantilever platform for humidity and soil moisture detection

Cited by 42 publications

References 25 publications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Graphene Oxide Array for In-Depth Soil Moisture Sensing toward Optimized Irrigation

Magneto-piezoresistivity in iron particle-filled silicone: An alternative outlook for reading magnetic field intensity and direction

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