2005
DOI: 10.4028/www.scientific.net/kem.295-296.557
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An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics

Abstract: The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.

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Cited by 2 publications
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“…These developments in sensor technology introduced the need to study the dynamic characteristics of ultra-precision air gauge systems. Rucki [23,24,25] and Zhang [26] both investigated metb.ods to reduce air gauge uncertainty. The most influential parameter of the pneumatic gauging system was found to be the ratio of nozzle outer diameter (de) to inner diameter (dp).…”
Section: Pneumatic Methodsmentioning
confidence: 99%
“…These developments in sensor technology introduced the need to study the dynamic characteristics of ultra-precision air gauge systems. Rucki [23,24,25] and Zhang [26] both investigated metb.ods to reduce air gauge uncertainty. The most influential parameter of the pneumatic gauging system was found to be the ratio of nozzle outer diameter (de) to inner diameter (dp).…”
Section: Pneumatic Methodsmentioning
confidence: 99%
“…W literaturze można spotkać konstrukcje czujników pneumatycznych o małej komorze, dających możliwość zmniejszenia stałej czasowej do kilku ms [39]. Rys.…”
Section: Czynniki Warunkujące Błąd Dynamicznyunclassified