An Optical Wavefront Sensor Based on a Double Layer Microlens Array

Lin, Vinna; Wei, Hsiang-Chun; Hsieh, Hsin-Ta; Su, Guo-Dung John

doi:10.3390/s111110293

Cited by 24 publications

(13 citation statements)

References 11 publications

(12 reference statements)

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“…[2][3][4][5][6][7][8] In the past several years, various methods have been explored for fabricating MLAs, including thermal reflow, 9 droplet method, 10 hot embossing, 11 gray-scale photolithography, 12 and so on.…”

Section: Introductionmentioning

confidence: 99%

Rapid Fabrication of Large-Area Concave Microlens Arrays on PDMS by a Femtosecond Laser

Yong

Yang

et al. 2013

ACS Appl. Mater. Interfaces

130

115

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A fast and single-step process is developed for the fabrication of low-cost, high-quality, and large-area concave microlens arrays (MLAs) by the high-speed line-scanning of femtosecond laser pulses. Each concave microlens can be generated by a single laser pulse, and over 2.78 million microlenses were fabricated on a 2 × 2 cm(2) polydimethylsiloxane (PDMS) sheet within 50 min, which greatly enhances the processing efficiency compared to the classical laser direct writing method. The mechanical pressure induced by the expansion of the laser-induced plasmas as well as a long resolidifing time is the reason for the formation of smooth concave spherical microstructures. We show that uniform microlenses with different diameters and depths can be controlled by adjusting the power of laser pulses. Their high-quality optical performance is also demonstrated in this work.

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Section: Introductionmentioning

confidence: 99%

Rapid Fabrication of Large-Area Concave Microlens Arrays on PDMS by a Femtosecond Laser

Yong

Yang

et al. 2013

ACS Appl. Mater. Interfaces

130

115

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“…MLAs have been widely applied, mainly in optical systems such as wavefront sensors, backlight modules, optical interconnects, optical data storage, and imaging systems 28 – 30 . Several methods for fabricating MLAs using e-beam, polymer, glass, and machining have been reported 9 , 31 – 33 .…”

Section: Resultsmentioning

confidence: 99%

Nanoscale 2.5-dimensional surface patterning with plasmonic lithography

Jung

Park

et al. 2017

Sci Rep

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We report an extension of plasmonic lithography to nanoscale 2.5-dimensional (2.5D) surface patterning. To obtain the impulse response of a plasmonic lithography system, we described the field distribution of a point dipole source generated by a metallic ridge aperture with a theoretical model using the concepts of quasi-spherical waves and surface plasmon–polaritons. We performed deconvolution to construct an exposure map of a target shape for patterning. For practical applications, we fabricated several nanoscale and microscale structures, such as a cone, microlens array, nanoneedle, and a multiscale structure using the plasmonic lithography system. We verified the possibility of applying plasmonic lithography to multiscale structuring from a few tens of nanometres to a few micrometres in the lateral dimension. We obtained a root-mean-square error of 4.7 nm between the target shape and the patterned shape, and a surface roughness of 11.5 nm.

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“…Nowadays, MLA has been applied to various systems such as wavefront sensor [1], backlight module [2], light extraction of organic light emitting device [3], and imaging system [4]. In recent years, omnidirectionally arranged optical elements, which contribute to the capability of wide field-of-view (FOV) imaging [5] and high-sensitivity detection [6], have attracted a great deal of research interest.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of gapless microlenses on spherical surface by multi-replication process

Cherng

2013

Current Developments in Lens Design and Optical Engineering XIV

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Artificial compound-eye structure has been studied recently due to its great applications of wide field-of-view imaging and backlight modules. However, fabrication process for microstructures on curvilinear surface has a lot of difficulties since traditional fabrication techniques are planar. In this paper, a simple and low-cost method to fabricate microlenses on spherical surface was demonstrated. Microlenses with high fill factor were formed by thermal reflow technique, followed by multiple replication processes to transfer the microlenses from planar substrate onto spherical surface. During the process, we made a curved mold with concave microlenses, which allowed this method to be duplicable easily. Polydimethylsiloxane (PDMS) elastomer was employed as the material of both microlenses and mold due to its flexibility and transparency for visible light. To prevent microlenses from being damaged during the release procedure, surface treatment using trichloro(1H,1H,2H,2H-perfluorooctyl)silane was applied before every replication process. Several PDMS domes covered with hexagonal or square microlenses on the surface were fabricated successfully. The diameter of each microlens was about 200 μm and the pitch of array was 220 μm. The radius of curvature of the spherical surface was about 6.1 mm. The uniformity of microlenses was analyzed through the intensity distribution of focused spots. Imaging performance of microlenses was shown. The curved microlens arrays were combined with image sensor, and clear images of objects at different distance are shown. The experimental results showed a high potential for curved microlens arrays being applied to compact mobile camera lens.

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An Optical Wavefront Sensor Based on a Double Layer Microlens Array

Cited by 24 publications

References 11 publications

Rapid Fabrication of Large-Area Concave Microlens Arrays on PDMS by a Femtosecond Laser

Rapid Fabrication of Large-Area Concave Microlens Arrays on PDMS by a Femtosecond Laser

Nanoscale 2.5-dimensional surface patterning with plasmonic lithography

Fabrication of gapless microlenses on spherical surface by multi-replication process

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