An offset-compensated switched-capacitor interface circuit for closed-loop MEMS capacitive accelerometer

Zhang, Tingting; Haojiong, Li; Jingqing, Huang; Zhao, Meng; Liu, Hong; Zhang, Yacong; Lu, Wengao; Chen, Zhongjian

doi:10.1109/icsict.2012.6466759

Cited by 2 publications

(2 citation statements)

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“…Force-feedback approach has been commonly used to minimize the impact of mechanical imperfections and inherent non-linearities in MEMS capacitive sensors through close-loop bias voltage tuning [14,23]. A feedback loop can be successfully exploited for offset cancellation and the dynamic range enhancement [24][25]. The reset noise reduction schemes [26] also include a feedback loop that either cancels the reset noise or reduces the bandwidth of noise or controls the reset process itself.…”

Section: Readout Interfacementioning

confidence: 99%

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Design of CMOS readout frontend circuit for MEMS capacitive microphones

et al. 2015

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This paper deals with a frontend part of the readout circuit developed as an integrated circuit that after bonding together with a MEMS capacitive microphone (MCM) chip will be used in a noise dosimeter applicable in very noisy and harsh environment, e.g. mine. Therefore, the main attention has been paid to the high dynamic range, low offset and low noise of the developed readout interface as well as its lowpower consumption feature. For conversion of the MCM's capacitance variation into voltage, an approach based on the buffered input conversion stage biased by a voltage divider was used. The advantage of this approach is that the voltage divider formed by MOS transistors can be connected to the high-impedance node (i.e. the output of the MCM, in this case). The whole frontend part of the readout interface was designed in a standard 0.35m CMOS technology. Finally, the achieved results are discussed and compared to other works.

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Section: Readout Interfacementioning

confidence: 99%

“…Therefore, main advantages include broad dynamic range, low power consumption and robustness against the environmental noise. However, the vast majority of realizations do not meet the readout circuit requirements for MEMS microphones [22][23][24][25][26][27].…”

Section: Readout Interfacementioning

confidence: 99%