An LC Wireless Microfluidic Sensor Based on Low Temperature Co-Fired Ceramic (LTCC) Technology

Abstract

This work reports a novel wireless microfluidic biosensor based on low temperature co-fired ceramic (LTCC) technology. The wireless biosensor consists of a planar spiral inductor and parallel plate capacitor (LC) resonant antenna, which integrates with microchannel bends in the LTCC substrate. The wireless response of the biosensor was associated to the changes of its resonant frequency due to the alteration in the permittivity of the liquid flow in the microchannel. The wireless sensing performance to different organic liquids with permittivity from 3 to 78.5 was presented. The measured results are in good agreement with the theoretical calculation. The wireless detection for the concentration of glucose in water solution was investigated, and an excellent linear response and repeatability were obtained. This kind of LC wireless microfluidic sensor is very promising in establishing wireless lab-on-a-chip for biomedical and chemical applications.

LTCC Flow Sensor with RFID Interface

“…The possibility of integrating electronic wirings, magnetic or piezoelectric components, and thick-film passive elements in 3D mechanical structures complements the benefit array of this technology. Therefore, LTCC is widely used in environmental resisted, multilayer, high frequency circuits, sensors, actuators, micro-systems, etc [8,[31][32][33]. Since micro-fluidic channel and chamber systems together with actuators, sensors, and electronic circuits can be bound in a common multilayer structure, the great opportunity to create sophisticated platforms for micro-reactors appears.…”

A Flow-Through Microfluidic Relative Permittivity Sensor

“…Microfluidic relative permittivity sensors have great potential for fluid discrimination and composition determination [1,2]. Applications include the detection of medicine composition in medical infusion pumps [3], single-cell impedance cytometry [4,5], composition detection in flow chemistry [6,7], production monitoring of polymers [8], void-fraction measurement in two-phase flow [9,10], and measurement of glucose concentration in water [11,12] or water content in oil [13,14].…”

Bismuth trioxide-tailored sintering temperature, microstructure and NTCR characteristics of Mn1.1Co1.5Fe0.4O4 ceramics

“…Consequently, the assembly of low temperature co-red ceramics (LTCC) with discrete sensors, resistors, and inductors into a single monolithic chip component can achieve multifunctional performance and promote miniaturization in the printed circuit board (PCB) during assembly. [1][2][3][4] For example, Wang et al 5 reported a novel V-modied Li 3 Mg 2 NbO 6 ceramics with outstanding microwave dielectric properties and can reach densication at 900 C. Li et al 6 synthesized the In-doped Mg-Cd ferrite at low sintering temperature using Bi 2 O 3 additive. These efforts make these ceramics promising candidates for LTCC applications.…”