“…The authors have recently been using this technique for the production of free‐standing polystyrene–platinum bimorph cantilever thermal microactuators for MEMS/NEMS applications (Lee et al ., 2011). These applications may, however, be limited by the creation of unwanted morphological and chemical modifications in the polymers due to variations in the surface structure of the polymer film (Ektessabi & Sano, 2000; Niihara et al ., 2005; Sezen et al ., 2009; Kim et al ., 2011; Sezen et al ., 2011). Critical issues in polymer micro/nanofabrication using the ion beam include direct sputtering and indirect thermal evaporation of surface atoms/molecules, depletion of main components of the polymer such as carbon, hydrogen, oxygen, etc., rearrangement of chemical bonds and cross‐linking, and incorporation of ions into the film (Ektessabi & Sano, 2000).…”