An Integrator-Backstepping-Based Dynamic Surface Control Method for a Two-Axis Piezoelectric Micropositioning Stage

Shieh, Hsin-Jang; Hsu, Chia-Hsiang

doi:10.1109/tcst.2006.890290

Cited by 51 publications

(28 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Then we have x 1 = x + r x sin(θ ), x 2 = x − r x sin(θ ), y 1 = y + r y sin(θ ), y 2 = y − r y sin(θ ). With the variables, the dynamics of Sawyer motor can be represented as [1]- [5] x = x v…”

Section: Modelingmentioning

confidence: 99%

“…Many feedback control methods have been studied for Sawyer motors [1]- [5]. Adaptive control methods have been developed to improve tracking performance and to regulate yaw and yaw rate [1], [2].…”

Section: Introductionmentioning

confidence: 99%

“…An adaptive variable structure controller was proposed to guarantee global asymptotic tracking of a reference trajectory [3]. Linear control approaches such as a proportional-integral-derivative controller and lead-lag controller were designed to improve the tracking performance of a the Sawyer motor [4], [5]. However, it is not easy to design controller to achieve improved transient response and high energy efficiency because the previous methods use static control gains.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nonlinear H<inf>2</inf> control of Sawyer motors

Lee

Shin

Kim

et al. 2014

2014 American Control Conference

View full text Add to dashboard Cite

In this paper we propose a nonlinear H 2 control to improve transient response in the position control and to reduce energy consumption for the position tracking of Sawyer motors. The proposed method consists of a nonlinear torque modulation with a commutation scheme and gain scheduling LPV controller. The position control problem for the Sawyer motor is reformulated into the LPV system optimal problem. The nonlinear models of the Sawyer motors are analyzed as a LPV system. However, in LPV formulation, each vertex to guarantee the controllability should be chosen because of relationship between tracking motion and yaw motion. Hence, stabilizing the inner-loop system with state feedback controller is designed to solve above problem. The control gain scheduling is determined by using H 2 control based on linear matrix inequality (LMI) approach. Since the proposed method is designed based on optimal control with gain scheduling based on LPV synthesis, the proposed method obtains both improved transient response and reduced energy consumption in the position control.

show abstract

Section: Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Nonlinear H<inf>2</inf> control of Sawyer motors

Lee

Shin

Kim

et al. 2014

2014 American Control Conference

View full text Add to dashboard Cite

show abstract

“…Recently, piezo-actuated stage has many effective applications in ultra-high precision positioning systems [2] [3] [6] [7] [8] [10]. The piezo electric actuator (PEA) is used to meet the requirement of nanometer resolution in displacement, high stiffness and rapid response.…”

Section: Introductionmentioning

confidence: 99%

Adaptive control for piezo-actuated XY-table

Chen

Hattori

2011

2011 IEEE International Conference on Mechatronics and Automation

View full text Add to dashboard Cite

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.Index Terms -XY-table, piezo electric actuators, hysteresis, high precision control.

show abstract

“…Piezo-actuated nano-positioner has many effective applications in ultra-high precision positioning, such as scanning probe microscopy, optical alignments, diamond turning machines, active vibration control, bio-operation devices [1], [2], [4]- [8], [12]]. The piezo electric actuator is used to meet the requirement of nanometer resolution in displacement, high stiffness and rapid response.…”

Section: Introductionmentioning

confidence: 99%

High precision control for piezo-actuated positioners

Chen

2009

2009 International Conference on Mechatronics and Automation

View full text Add to dashboard Cite

The piezo-actuated nano-positioner is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezoactuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither to be identified nor to be measured. The proposed control law ensures the global stability of the controlled nann-positioner, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

show abstract

An Integrator-Backstepping-Based Dynamic Surface Control Method for a Two-Axis Piezoelectric Micropositioning Stage

Cited by 51 publications

References 24 publications

Nonlinear H<inf>2</inf> control of Sawyer motors

Nonlinear H<inf>2</inf> control of Sawyer motors

Adaptive control for piezo-actuated XY-table

High precision control for piezo-actuated positioners

Contact Info

Product

Resources

About