An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset

Luan, Xingsheng; Huang, Yongjun; Li, Y.; McMillan, James F.; Zheng, Jiangjun; Huang, Shu‐Wei; Hsieh, Pang‐Hsin; Gu, Tingyi; Wang, Di; Hati, Archita; Howe, David A.; Wen, Guangjun; Yu, Mingbin; Lo, Guo‐Qiang; Kwong, Dim‐Lee; Wong, Chee Wei

doi:10.1038/srep06842

Cited by 56 publications

(48 citation statements)

References 40 publications

(86 reference statements)

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“…Facilitated by photonic micro-/nano-cavities with greatly enhanced optomechanical coupling, diverse chip-scale optomechanical systems have been developed on a variety of material platforms23456789101112, showing great promise for broad applications ranging from precision measurements and sensing131415, to frequency metrology161718, information processing192021, and quantum physics222324252627. In particular, materials such as aluminium nitride826, diamond9102829, and silicon carbide12, have recently attracted great research interest for cavity optomechanics, due to their wide electronic band gap to allow broadband optical operation, large refractive index to enable strong optical confinement, and excellent mechanical properties to achieve high mechanical frequency and low mechanical dissipation.…”

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confidence: 99%

Chip-scale cavity optomechanics in lithium niobate

Jiang

Lin

2016

Sci Rep

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We develop a chip-scale cavity optomechanical system in single-crystal lithium niobate that exhibits high optical quality factors and a large frequency-quality product as high as 3.6 × 1012 Hz at room temperature and atmosphere. The excellent optical and mechanical properties together with the strong optomechanical coupling allow us to efficiently excite the coherent regenerative optomechanical oscillation operating at 375 MHz with a threshold power of 174 μW in the air. The demonstrated lithium niobate optomechanical device enables great potential for achieving electro-optic-mechanical hybrid systems for broad applications in sensing, metrology, and quantum physics.

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confidence: 99%

Chip-scale cavity optomechanics in lithium niobate

Jiang

Lin

2016

Sci Rep

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“…With increasing driving power, thermal nonlinearity broadens the cavity resonances into asymmetric line‐shapes. With optical pump powers greater than 188 µW, the optomechanical cavity is driven into self‐induced regenerative oscillations [ 13 ] —with significantly narrower mechanical oscillation linewidths and signature spectral fluctuations (shown in red of Figure 1c).…”

Section: Resultsmentioning

confidence: 99%

“…The CMOS fabrication is described in ref. [13]. In the electron‐beam lithography, an ultrasonicator and O 2 plasma were used to prepare and clean the surface of the wafer before spin‐casting 100% ZEP 520A resist on it.…”

Section: Methodsmentioning

confidence: 99%

A Chip‐Scale Oscillation‐Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits

Huang

Flores

et al. 2020

Laser & Photonics Reviews

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Modern navigation systems integrate the global positioning system (GPS) with an inertial navigation system (INS), which complement each other for correct attitude and velocity determination. The core of the INS integrates accelerometers and gyroscopes used to measure forces and angular rate in the vehicular inertial reference frame. With the help of gyroscopes and by integrating the acceleration to compute velocity and distance, precision and compact accelerometers with sufficient accuracy can provide small-error location determination. Solid-state implementations, through coherent readout, can provide a platform for high performance acceleration detection. In contrast to prior accelerometers using piezoelectric or capacitive readout techniques, optical readout provides narrow-linewidth high-sensitivity laser detection along with low-noise resonant optomechanical transduction near the thermodynamical limits. Here an optomechanical inertial sensor with an 8.2 µg Hz −1/2 velocity random walk (VRW) at an acquisition rate of 100 Hz and 50.9 µg bias instability is demonstrated, suitable for applications, such as, inertial navigation, inclination sensing, platform stabilization, and/or wearable device motion detection. Driven into optomechanical sustained-oscillation, the slot photonic crystal cavity provides radio-frequency readout of the optically-driven transduction with an enhanced 625 µg Hz −1 sensitivity. Measuring the optomechanically-stiffened oscillation shift, instead of the optical transmission shift, provides a 220× VRW enhancement over pre-oscillation mode detection.

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“…For the potential sensing applications, our next step is to integrate the on-chip silicon waveguide to couple in the laser drive source and couple out the modulated optical powers, like the works have done previously 11, 38 .…”

Section: Discussionmentioning

confidence: 99%

A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics

Huang

Flores

Cai

et al. 2017

Sci Rep

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For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically exhibiting large optomechanical coupling of 44 GHz/nm or more, for both optical resonance modes. The mechanical stiffening range of ≈58 kHz and a more than 100th-order harmonics are obtained, with which the free-running frequency instability is lower than 10−6 at 100 ms integration time. Such results can be applied to further improve the sensing performance of the optomechanical inspired chip-scale sensors.

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An integrated low phase noise radiation-pressure-driven optomechanical oscillator chipset

Cited by 56 publications

References 40 publications

Chip-scale cavity optomechanics in lithium niobate

Chip-scale cavity optomechanics in lithium niobate

A Chip‐Scale Oscillation‐Mode Optomechanical Inertial Sensor Near the Thermodynamical Limits

A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics

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