2017
DOI: 10.1038/s41598-017-04882-4
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A low-frequency chip-scale optomechanical oscillator with 58 kHz mechanical stiffening and more than 100th-order stable harmonics

Abstract: For the sensitive high-resolution force- and field-sensing applications, the large-mass microelectromechanical system (MEMS) and optomechanical cavity have been proposed to realize the sub-aN/Hz1/2 resolution levels. In view of the optomechanical cavity-based force- and field-sensors, the optomechanical coupling is the key parameter for achieving high sensitivity and resolution. Here we demonstrate a chip-scale optomechanical cavity with large mass which operates at ≈77.7 kHz fundamental mode and intrinsically… Show more

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Cited by 8 publications
(1 citation statement)
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“…Due to its high electrical and thermal conductivity, combined with thermal stability, mechanical strength, and chemical inertness, graphene has been considered for use in a variety of applications such as transistors [ 1 , 2 ], power detectors [ 3 ], mixers [ 4 ], low-noise amplifiers [ 5 ], frequency doublers [ 6 ], resonators [ 7 ], and sensors [ 8 ]. In addition, its relatively high transparency in the visible spectral range underlines its potential as a transparent electrode for optoelectronic devices, including light-emitting diodes and solar cells [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…Due to its high electrical and thermal conductivity, combined with thermal stability, mechanical strength, and chemical inertness, graphene has been considered for use in a variety of applications such as transistors [ 1 , 2 ], power detectors [ 3 ], mixers [ 4 ], low-noise amplifiers [ 5 ], frequency doublers [ 6 ], resonators [ 7 ], and sensors [ 8 ]. In addition, its relatively high transparency in the visible spectral range underlines its potential as a transparent electrode for optoelectronic devices, including light-emitting diodes and solar cells [ 9 ].…”
Section: Introductionmentioning
confidence: 99%