“…Next, the designed channel patterns were transferred to silicon wafers using a mask aligner (ES 20, Nanometric Technology, Inc., Japan). After developing in ethyl lactate (Wako Pure Chemical Ind., Osaka, Japan), the surface of masters were treated with dimethyloctadecylchlorosilane 23 (Shin-Etsu Chem. Co., Japan) for the easy peeling off of a PDMS replica.…”