An inexpensive and highly efficient device for observing a transmitted electron image in SEM

Oho, Eisaku; Sasaki, Tatsuo; Adachi, Kôichi; Muranaka, Yoshinori; Kanaya, K.

doi:10.1002/jemt.1060050105

Cited by 6 publications

(4 citation statements)

References 7 publications

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“…The least expensive system for obtaining TEM-like images with almost any SEM, the mode we have called pseudo-TSEM, has been reassessed recently by Oho, Sasaki , Adachi, Muranaka, and Kanaya (1987). These investigators made an inexpensive and highly efficient device for observing a transmitted electron image in SEM.…”

Section: Discussionmentioning

confidence: 99%

Adaptability of Scanning Electron Microscopy to Studies of Pollen Morphology

Skvarla¹,

Rowley²,

Chissoe³

1988

Aliso

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We have explored methods to achieve excellent results in study of the pollen grain wall by using only one electron microscope, the scanning electron microscope (SEM). While the secondary electron imaging mode , the most common in use, has great value in characterizing the exine surface it is possible to obtain a more comprehensive representation of pollen grain walls by expanding the capability of the secondary mode and mak ing use of backscatter and transmission imaging detectors. In this way information is obtained about internal exine features that are likely to be more stable phylogeneticall y than the generally late-to-form surface structure. We illustrate the usefulness ofnatural and induced fractures, cryornicrotorny, thin-section examination, section deplasticization, localized acetolysis and pollen erosion by ionic bombardment in imaging exine structure. Techniques for expand ing the use of SEM in taxonomic stud ies of mature pollen grain walls are outlined in flow chart sketches and illustrated with numerous examples from angiosperm pollen.

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Section: Discussionmentioning

confidence: 99%

Adaptability of Scanning Electron Microscopy to Studies of Pollen Morphology

Skvarla¹,

Rowley²,

Chissoe³

1988

Aliso

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“…STEM-IN-SEM as compared with BF TEM observation of silver nanoparticles~Vanderlinde & Ballarotto, 2004! andbacteria~Bogner et al, 2007!. Various specimen-holder geometries and detector arrangements have been used for STEM-IN-SEM imaging but have primarily focused on BF imaging~e.g., Crawford & Liley, 1970;Woolf et al, 1972;Oho et al, 1987aOho et al, , 1987bVanderlinde & Ballarotto, 2004;Merli & Morandi, 2005;Bogner et al, 2007! while work on DF imaging~e.g., Crawford & Liley, 1970;Merli & Morandi, 2005;Acevedo-Reyes et al, 2008;Brodusch et al, 2013!…”

Section: Introductionmentioning

confidence: 99%

“…Various specimen-holder geometries and detector arrangements have been used for STEM-IN-SEM imaging but have primarily focused on BF imaging (e.g., Crawford & Liley, 1970; Woolf et al, 1972; Oho et al, 1987 a , 1987 b ; Vanderlinde & Ballarotto, 2004; Merli & Morandi, 2005; Bogner et al, 2007) while work on DF imaging (e.g., Crawford & Liley, 1970; Merli & Morandi, 2005; Acevedo-Reyes et al, 2008; Brodusch et al, 2013) has been limited by technology (until recently) or by the costly acquisition of new instrumentation (e.g., detectors). STEM-IN-SEM imaging has been applied to morphological observation of various polymer-based latex particles (Geng et al, 2013), mask metrology (Klein et al, 2012), X-ray elemental mapping (Stokes & Baken, 2007), X-ray spectral imaging of thin specimens prepared by a focused ion beam method (Kotula, 2009), particle-size distribution measurements both in BF (Klein et al, 2011) and DF (with a dedicated detector) (Acevedo-Reyes et al, 2008), as well as extreme high resolution SEM, in which a monochromator and a 12-segment STEM detector provide the potential for sub-nanometer spatial resolution (Roussel et al, 2009).…”

Section: Introductionmentioning

confidence: 99%

An Inexpensive Approach for Bright-Field and Dark-Field Imaging by Scanning Transmission Electron Microscopy in Scanning Electron Microscopy

Patel

Watanabe

2014

Microsc Microanal

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Scanning transmission electron microscopy in scanning electron microscopy (STEM-in-SEM) is a convenient technique for soft materials characterization. Various specimen-holder geometries and detector arrangements have been used for bright-field (BF) STEM-in-SEM imaging. In this study, to further the characterization potential of STEM-IN-SEM, a new specimen holder has been developed to facilitate direct detection of BF signals and indirect detection of dark-field (DF) signals without the need for substantial instrument modification. DF imaging is conducted with the use of a gold (Au)-coated copper (Cu) plate attached to the specimen holder which directs highly scattered transmitted electrons to an off-axis yttrium-aluminum-garnet (YAG) detector. A hole in the copper plate allows for BF imaging with a transmission electron (TE) detector. The inclusion of an Au-coated Cu plate enhanced DF signal intensity. Experiments validating the acquisition of true DF signals revealed that atomic number (Z) contrast may be achieved for materials with large lattice spacing. However, materials with small lattice spacing still exhibit diffraction contrast effects in this approach. The calculated theoretical fine probe size is 1.8 nm. At 30 kV, in this indirect approach, DF spatial resolution is limited to 3.2 nm as confirmed experimentally.

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“…Just as in TEM/STEM, BF STEM‐IN‐SEM images form mass‐thickness contrast with signal intensity dependent on both the mass of the constituents in a specimen and the actual specimen thickness. Many microscope configurations for STEM‐IN‐SEM have been developed for BF imaging . Recently, using the lower voltage electron beam, larger field of view and exclusion of postspecimen projection lens in a SEM instrument, BF STEM‐IN‐SEM imaging has shown results similar to BF TEM observation of polymer morphology .…”

Section: Introductionmentioning

confidence: 99%

Bright field and dark field STEM‐IN‐SEM imaging of polymer systems

Patel

Pearson

Watanabe

2014

J of Applied Polymer Sci

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The microstructural analysis of polymer systems (e.g., polymers and their composites) has largely been conducted by transmission electron microscopy (TEM). However, hard materials (e.g., metals and ceramics) are better suited for TEM imaging because such materials can withstand the high energy electron beam generated in TEM instruments. Recently, scanning TEM in scanning electron microscopy (STEM-IN-SEM) has emerged as a viable alternative to TEM imaging of polymer systems. STEM-IN-SEM uses a versatile and user-friendly SEM instrument for examining the microstructure of polymer systems. In this study, we outline our method for STEM-IN-SEM imaging and apply it to the imaging of various commercial and model polymer systems. Imaging results are evaluated on the basis of measured signal intensity, which compare favorably to microstructural analysis using more costly TEM and STEM instruments. Furthermore, these comparable signal intensities are achieved through STEM-IN-SEM imaging with specimens that are three times thicker than those required for conventional TEM imaging. In this respect, as compared to TEM, STEM-IN-SEM offers faster specimen preparation times coupled with easier usability and lower maintenance costs, which are all attractive attributes for efficient quality control measures in industry.

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An inexpensive and highly efficient device for observing a transmitted electron image in SEM

Cited by 6 publications

References 7 publications

Adaptability of Scanning Electron Microscopy to Studies of Pollen Morphology

Adaptability of Scanning Electron Microscopy to Studies of Pollen Morphology

An Inexpensive Approach for Bright-Field and Dark-Field Imaging by Scanning Transmission Electron Microscopy in Scanning Electron Microscopy

Bright field and dark field STEM‐IN‐SEM imaging of polymer systems

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