2010
DOI: 10.1166/jno.2010.1123
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An Improved Photoinduced Model for Silicon Based Microcantilever

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“…Because of the many applications of laser beam deflection measurement of a microcantilever a number of studies have explored how the laser spot may change the mechanical properties of the cantilever [1][2][3][4] and affect the accuracy of its vibrational frequency measurement. 5,6 It is known that Joule heating, via both a temperature dependent Young's modulus and thermal expansion, shifts the vibrational frequency to the red for silicon and silicon nitride.…”
Section: Introductionmentioning
confidence: 99%
“…Because of the many applications of laser beam deflection measurement of a microcantilever a number of studies have explored how the laser spot may change the mechanical properties of the cantilever [1][2][3][4] and affect the accuracy of its vibrational frequency measurement. 5,6 It is known that Joule heating, via both a temperature dependent Young's modulus and thermal expansion, shifts the vibrational frequency to the red for silicon and silicon nitride.…”
Section: Introductionmentioning
confidence: 99%