An improved method of trimethylindium transport for the growth of indium phosphide and related alloys by MOVPE

Gerrard, Neil D.; Smith, Lesley M.; Jones, Anthony C.; Bosnell, J.R.

doi:10.1016/0022-0248(92)90161-b

Cited by 18 publications

(8 citation statements)

References 4 publications

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“…Improved results were noted for a dual-chamber bubbler design, which mimics the commonly used arrangement of connecting two bubblers in series to achieve reliable pick-up [1]. Superior results were also shown for a cross-dipleg design.…”

Section: Resultsmentioning

confidence: 60%

“…2(b) highlights the depletion around the dipleg that arises from using this configuration. Clearly, as the TMI is removed preferentially from around the diptube area the remaining TMI is not contacted by the carrier gas to the same degree resulting in a reduced pick-up efficiency as the bubbler is used [1].…”

Section: Resultsmentioning

confidence: 99%

“…For solid precursors, e.g. Trimethylindium (TMI) the simple diptube bubbler design has been demonstrated to have a performance range that does not meet all customer requirements, especially at high material transport rates [1,2]. Channelling effects are deemed the main cause of pick up variations and different container geometries have been proposed to achieve improved gas-phase saturation and transport efficiency [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

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Trimethylindium transport studies: the effect of different bubbler designs

Smith¹,

Odedra²,

Kingsley³

et al. 2004

Journal of Crystal Growth

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Section: Resultsmentioning

confidence: 60%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Trimethylindium transport studies: the effect of different bubbler designs

Smith¹,

Odedra²,

Kingsley³

et al. 2004

Journal of Crystal Growth

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“…At the heart of the system is a stainless steel TMI sublimation chamber sourced from Sigma-Aldrich, which was submersed in a chilled water/antifreeze bath. The chamber function is described by Gerrard 12 and was used in the standard flow configuration for this application. Stainless steel 6 mm tubing, valves, and junctions from Swagelok were used to construct the seeding system.…”

Section: B Seeding Systemmentioning

confidence: 99%

Vapor phase tri-methyl-indium seeding system suitable for high temperature spectroscopy and thermometry

Whiddon

Zhou

Borggren

et al. 2015

Review of Scientific Instruments

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Link to publicationCitation for published version (APA): Whiddon, R., Zhou, B., Borggren, J., Aldén, M., & Li, Z. (2015). Vapor phase tri-methyl-indium seeding system suitable for high temperature spectroscopy and thermometry. Review of Scientific Instruments, 86(9), [093107]. DOI: 10.1063/1.4930123 General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal Tri-methyl-indium (TMI) is used as an indium transport molecule to introduce indium atoms to reactive hot gas flows/combustion environments for spectroscopic diagnostics. A seeding system was constructed to allow the addition of an inert TMI laden carrier gas into an air/fuel mixture burning consequently on a burner. The amount of the seeded TMI in the carrier gas can be readily varied by controlling the vapor pressure through the temperature of the container. The seeding process was calibrated using the fluorescent emission intensity from the indium 6 2 S 1/2 → 5 2 P 1/2 and 6 2 S 1/2 → 5 2 P 3/2 transitions as a function of the calculated TMI seeding concentration over a range of 2-45 ppm. The response was found to be linear over the range 3-22.5 ppm; at concentrations above 25 ppm there is a loss of linearity attributable to self-absorption or loss of saturation of TMI vapor pressure in the carrier gas flow. When TMI was introduced into a post-combustion environment via an inert carrier gas, molecular transition from InH and InOH radicals were observed in the flame emission spectrum. Combined laser-induced fluorescence and absorption spectroscopy were applied to detect indium atoms in the TMI seeded flame and the measured atomic indium concentration was found to be at the ppm level. This method of seeding organometallic vapor like TMI to a reactive gas flow demonstrates the feasibility for quantitative spectroscopic investigations that may be applicable in various fields, e.g., chemical vapor deposition applications or temperature measurement in flames with two-line atomic fluorescence. C 2015 AIP Publishing LLC.[http://dx

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“…Solutions to this problem have included Solution TMI TM , 1 and dual reverse flow bubblers of solid TMI. 2 A detailed investigation of the transport characteristics of Solution TMI has been performed, resulting in an increased understanding of its physical properties. This included the use of an Epison III ultrasonic analyzer to monitor the pick up of TMI in the vapor phase at various flow rates (100-1000 sccm), pressures (0.3 and 1 atm.)…”

Section: Introductionmentioning

confidence: 99%