2007
DOI: 10.1016/j.tsf.2006.11.196
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An examination of trace surface on diamond-like carbon film after ball-on disk measurement

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Cited by 7 publications
(17 citation statements)
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“…DLC is one of the exciting and highly sought aer materials in industrial applications due to its high hardness, high elastic modulus, high electrical resistivity, good eld emission, high thermal conductivity, high optical transparency and high chemical inertness. [1][2][3][4] DLC lms are commonly used for cutting tools, anticorrosion coatings, tribological and electrochemical applications, in addition to various other applications such as protective layers in magnetic storage devices and microelectromechanical systems (MEMS). [5][6][7][8][9][10] The properties of DLC are inuenced by several features like; (a) sp 3 content, (b) H-content, (c) sp 2 cluster phase, (d) sp 2 cluster size, (e) number density of sp 2 cluster, (f) sp 2 cluster phase orientation and (g) any cross-sectional structure, as a consequence of interaction among sp 2 and sp 3 bonding of carbon.…”
Section: Introductionmentioning
confidence: 99%
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“…DLC is one of the exciting and highly sought aer materials in industrial applications due to its high hardness, high elastic modulus, high electrical resistivity, good eld emission, high thermal conductivity, high optical transparency and high chemical inertness. [1][2][3][4] DLC lms are commonly used for cutting tools, anticorrosion coatings, tribological and electrochemical applications, in addition to various other applications such as protective layers in magnetic storage devices and microelectromechanical systems (MEMS). [5][6][7][8][9][10] The properties of DLC are inuenced by several features like; (a) sp 3 content, (b) H-content, (c) sp 2 cluster phase, (d) sp 2 cluster size, (e) number density of sp 2 cluster, (f) sp 2 cluster phase orientation and (g) any cross-sectional structure, as a consequence of interaction among sp 2 and sp 3 bonding of carbon.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] DLC lms are commonly used for cutting tools, anticorrosion coatings, tribological and electrochemical applications, in addition to various other applications such as protective layers in magnetic storage devices and microelectromechanical systems (MEMS). [5][6][7][8][9][10] The properties of DLC are inuenced by several features like; (a) sp 3 content, (b) H-content, (c) sp 2 cluster phase, (d) sp 2 cluster size, (e) number density of sp 2 cluster, (f) sp 2 cluster phase orientation and (g) any cross-sectional structure, as a consequence of interaction among sp 2 and sp 3 bonding of carbon. 11,12 The above mentioned factors including chemical bonding of carbon atoms and mechanical properties like elasticity and hardness of the DLC lms depend upon the deposition method and the parameters used therein.…”
Section: Introductionmentioning
confidence: 99%
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“…The deposition time was fixed at 5 min 30 s for each sample to achieve same thickness film of 120 nm. The experimental parameters used in this study were shown in previous work [21]. After the deposition, the DLC film was annealed with the RTP in nitrogen ambient.…”
Section: Methodsmentioning
confidence: 99%