An Evaporative Initiated Chemical Vapor Deposition Coater for Nanoglue Bonding

Abstract

The authors present an evaporative initiated chemical vapor deposition (iCVD) coater and use it to establish a submicron bonding process for millimeter-scale foils with potentially rough surface features. The coater uses a simple benchtop design suited to research labs, with pre-heated metal pins instead of hot filaments, and direct evaporation of reactants within the chamber. Coatings of poly(glycidyl methacrylate) (pGMA) with thickness 100-800 nm are achieved at rates of 10-40 nm min À1 on substrates common in high energy laser compression experiments. Coating uniformities of 10-30 nm mm À1 are demonstrated in a %60 Â 10 mm zone under the heated pins. As an aside, the authors further show the ability to coat intentionally non-uniform layers in a monomer vapor diffusion gradient. Coatings are formed on both plastics and solids ranging from smooth, non-burred silicon or lithium fluoride to rough and burred metals (aluminum and copper). These coated substrates are then chemically bonded under mild heat and pressure. Detailed surface, thickness, and cross-sectional characterization is performed to confirm a submicron bond gap and to troubleshoot the common clearance issues from burrs, roughness, and surface curvature. Peeling and dropping bond strength tests confirm the bonds are robust, when coated and assembled under conditions to mitigate clearance issues.

Designing Organic and Hybrid Surfaces and Devices with Initiated Chemical Vapor Deposition (iCVD)

“…Low-cost laboratory scale iCVD systems have also been reported. [146] Significantly, iCVD has been extended for the growth of hybrid materials. Non-brittle hybrid layers offer increased values of dielectric constant and index of refraction as desired for nextgeneration flexible and stretchable optoelectronic devices.…”

Controlled Release Utilizing Initiated Chemical Vapor Deposited (iCVD) of Polymeric Nanolayers

“…Motivated by lower the cost per unit area, iCVD deposition has been demonstrated for the fabrication of large-area polymer thin films and operation by roll-to-roll processing (Gupta and Gleason, 2006 ; Pryce Lewis et al, 2009 ; Kovacik et al, 2015 ; Cheng and Gupta, 2018 ; Yilmaz et al, 2019 ). Additionally, innovation is reducing the cost of laboratory-scale CVD polymer reactors (Randall et al, 2018 ). The design of the iCVD reactor determines the geometry of the substrates that can be coated.…”