An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications

Abstract

In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.

Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress

“…Specifically, the technology yield, the maximum allowed number of actuations and the lifetime (mainly limited by charging processes [5]) have been previously studied. Several configurations have been tested and modeled [6] exhibits a metal-to-metal contact, rather than a Metal-InsulatorMetal (MIM) structure. An ideal series switch acts as an open circuit when it is in its rest position (no actuation voltage applied), or it acts as a low impedance path for the RF signal when the threshold actuation voltage is applied.…”

Capacitive RF MEMS Switches With Tantalum-Based Materials

“…Specifically, circuit simulations are able to describe the experimental data provided that a tunable series capacitance (C s ) is added to the RLC model. As reported in [20], the reason for this additional series capacitance is likely a residual air gap between the actuated bridge and the dielectric underneath it due to a poor flatness of the bridge caused by both residual stress and stress gradient in the suspended gold membrane. A curvature in the central region of the bridge can be indeed noticed in Fig.…”

“…5). For these simulations, the equivalent resistor-inductor-capacitor (RLC) circuit model, together with the related formulas previously proposed in [20], was used. The measured S parameters are found to be well described by the results provided by the circuit simulations, with a 0.07-pF equivalent up capacitance (C up ).…”

The Image Phase Approach for the Design of Rf Mems Shunt Switches

“…To this end the proper modeling of the membrane plays a crucial role. A number of papers have been published on this topic in literature [14][15][16][17][18][19]. Recently a general and accurate equivalent circuit has been developed in [8] for the coplanar bridge in the "up" position.…”