“…radiation~Attwood, 1999!. Laser plasma X-ray and EUV sources are considered to be used in many applications in science and technology which are discussed in current literature~Gizzi et al, Faenov et al, 2004;Turcu et al, 2004;Desai et al, 2003;Pikuz et al, 2001;Marzi et al, 2000;Turcu & Dane, 1998;Attwood, 1999!. In laser plasma X-ray and EUV sources the laser radiation interacts with solid, liquid, or gas targets. During the lasertarget interaction hot and dense plasma is created which emits strong radiation in the soft X-ray and EUV range.…”