2022
DOI: 10.1016/j.solmat.2022.111637
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An electron-selective SiC /SiO contact for Si solar cells made with fully industrial techniques

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Cited by 2 publications
(10 citation statements)
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“…Despite containing a huge amount of P (2 at. %), not much difference is seen in the residual stress (for r ≥ 1.2) and the H content between the intrinsic and P-doped films for a given r value. Moreover, both P-doped and intrinsic non-blistering SRC r films were achieved with the same r value of 1.6 and higher; the big differences in the blistering severity of the r < 1.6 films could be a result of the different tools used for the blistering tests.…”
Section: Resultsmentioning
confidence: 82%
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“…Despite containing a huge amount of P (2 at. %), not much difference is seen in the residual stress (for r ≥ 1.2) and the H content between the intrinsic and P-doped films for a given r value. Moreover, both P-doped and intrinsic non-blistering SRC r films were achieved with the same r value of 1.6 and higher; the big differences in the blistering severity of the r < 1.6 films could be a result of the different tools used for the blistering tests.…”
Section: Resultsmentioning
confidence: 82%
“…In our previous work with P-doped SRC2.0, we achieved a J 0 of 4 fA/ cm 2 with fully industrial processing techniques. 37 Ingenito and the co-authors reported a J 0 of 4 fA/cm 2 with their P-doped SiC x film. 22 As for passivation with N-containing Si films, Yang et al reported a J 0 value of 1.7 fA/cm 2 with an in situ P-doped SiN x film containing 15 at.…”
Section: Determination Of Excess Si Content and Crystallinity Ofmentioning
confidence: 92%
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