An efficient rough-interface scattering model for embedded nano-structures

Karamehmedović, Mirza; Hansen, Poul Erik; Wriedt, Thomas

doi:10.1016/j.tsf.2012.11.048

Cited by 5 publications

(8 citation statements)

References 7 publications

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“…[16]. Investigation of line edge and line width roughness of simple scatterometry profile has also been performed [5][6][7]. Very little research has been on the study of complex devices using scatterometry since it is believed that unique solutions cannot be found.…”

Section: Introductionmentioning

confidence: 99%

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Hansen

Madsen

Lehtolahti

et al. 2017

Applied Surface Science

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Section: Introductionmentioning

confidence: 99%

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Hansen

Madsen

Lehtolahti

et al. 2017

Applied Surface Science

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“….) and not only on roughness values alone [7,10,12,15,16,19,32,33,35,45], it needs to be mentioned that samples with a mean surface roughness lower than 0.05 µm or incidence angles α > 75 ○ are strong reflectors of incident light, which results in extreme difficulties for optical heating. This roughness limit corresponds to a surface treatment with 4000 grit size grinding paper or a subsequent polishing step.…”

Section: Resultsmentioning

confidence: 99%

“…For efficient optical heating of a sample, A = 1 − R − S should be maximised. While the reflectivity R for a specularly reflected beam is essentially depending on the material of the substrate, light scattering S strongly depends on surface properties, like roughness [8]- [12]. Despite the fact that optical heating is used in many modern hightemperature laboratories [13,14], only little is known about the effects of surface preparation on efficiency of optical heating.…”

Section: Introductionmentioning

confidence: 99%

“…Recent years have seen a tremendous progress in the understanding of the optical properties of surfaces with nanoscopic up to microscopic roughness [15]- [17], surfaces decorated with or embedding small particles [12], [18]- [22], or regular, non-planar surfaces, including defects [11,23,24]. Nevertheless, a full, rigorous description of the scattering from an arbitrary metallic surface is still rather challenging.…”

Section: Introductionmentioning

confidence: 99%

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Effect of surface roughness on optical heating of metals

Auinger

Ebbinghaus

Blümich

et al. 2014

J. Eur. Opt. Soc.-Rapid Publ.

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Heating by absorption of light is a commonly used technique to ensure a fast temperature increase of metallic samples. The rate of heating when using optical heating depends critically on the absorption of light by a sample. Here, the reflection and scattering of light from UV to IR by surfaces with different roughness of iron-based alloy samples (Fe, 1 wt-% Cr) is investigated. A combination of ellipsometric and optical scattering measurements is used to derive a simplified parametrisation which can be used to obtain the absorption of light from random rough metal surfaces, as prepared through conventional grinding and polishing techniques. By modelling the ellipsometric data of the flattest sample, the pseudodielectric function of the base material is derived. Describing an increased roughness by a Maxwell-Garnett model does not yield a reflectivity which follows the experimentally observed sum of scattered and reflected intensities. Therefore, a simple approach is introduced, based on multiple reflections, where the number of reflections depends on the surface roughness. This approach describes the data well, and is subsequently used to estimate the fraction of absorbed energy. Using numerical modelling, the effect on the heating rate is investigated. A numerical example is analysed, which shows that slight changes in roughness may result in big differences of the energy input into a metallic sample, with consequences on the achieved temperatures. Though the model oversimplifies reality, it provides a physically intuitive approach to estimate trends.

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“…Surface scattering phenomena is an important topic in diverse areas of science and engineering, especially in optical applications [1][2][3][4]. Researchers have investigated the prediction of the scattered light distribution from random rough surfaces and proposed various theories and methods [5][6][7][8][9][10][11][12][13]. The Phong and Ward models [5], for example, are phenomenological models with a small number of parameters that can be manipulated interactively to achieve the appearance of an object.…”

Section: Introductionmentioning

confidence: 99%

Harvey–Shack theory for a converging–diverging Gaussian beam

Hansen²,

wang

et al. 2023

J. Opt. Soc. Am. B

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The scattering characteristics of random rough surfaces illuminated with a 3D converging–diverging Gaussian beam are investigated by applying the conventional Harvey–Shack theory in conjunction with 2D plane-wave decomposition. The Gaussian beam is assumed to have an arbitrary angle of incidence and to be linearly s-polarized. Using data obtained from laser BRDF measurements on isotropic random rough surfaces with low surface roughness, we demonstrate that the Gaussian beam Harvey–Shack theory is in better accordance with the experimental data than the conventional Harvey–Shack theory. The two models become identical for a large beam waist radii but are significantly different for smaller ones.

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An efficient rough-interface scattering model for embedded nano-structures

Cited by 5 publications

References 7 publications

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Effect of surface roughness on optical heating of metals

Harvey–Shack theory for a converging–diverging Gaussian beam

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